Double-sided capacitively coupled silicon strip detectors on a 100 mm wafer

R. Brenner, I. Hietanen, J. Lindgren, R. Orava, C. Rönnqvist, T. Schulman, T. Tuura, Mikael Andersson, Kari Leinonen, Hannu Ronkainen

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)

    Abstract

    Silicon strip detectors with double-sided readout have been designed and processed on 100 mm silicon wafers. Detectors with integrated coupling capacitors and polysilicon bias resistors were tested by static electrical measurements, laser illumination and with tracks from a 90Sr source. Strip separation on the detector n-side has been achieved by the use of capacitively coupled readout electrodes as field-plates. Interstrip resistance of > 10 Mω has been measured in all detector designs. Measurements with 90Sr tracks show S/N = 21 on the detector p-side and S/N = 18 on the n-side.
    Original languageEnglish
    Pages (from-to)502-506
    Number of pages5
    JournalNuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
    Volume315
    Issue number1-3
    DOIs
    Publication statusPublished - 1992
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    strip
    wafers
    Detectors
    Silicon
    detectors
    silicon
    readout
    Silicon wafers
    Polysilicon
    resistors
    Resistors
    electrical measurement
    Light sources
    capacitors
    Capacitors
    Lighting
    illumination
    Electrodes
    electrodes
    Lasers

    Cite this

    Brenner, R. ; Hietanen, I. ; Lindgren, J. ; Orava, R. ; Rönnqvist, C. ; Schulman, T. ; Tuura, T. ; Andersson, Mikael ; Leinonen, Kari ; Ronkainen, Hannu. / Double-sided capacitively coupled silicon strip detectors on a 100 mm wafer. In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 1992 ; Vol. 315, No. 1-3. pp. 502-506.
    @article{43595f79916f407896c1d8cc7a8ccd79,
    title = "Double-sided capacitively coupled silicon strip detectors on a 100 mm wafer",
    abstract = "Silicon strip detectors with double-sided readout have been designed and processed on 100 mm silicon wafers. Detectors with integrated coupling capacitors and polysilicon bias resistors were tested by static electrical measurements, laser illumination and with tracks from a 90Sr source. Strip separation on the detector n-side has been achieved by the use of capacitively coupled readout electrodes as field-plates. Interstrip resistance of > 10 Mω has been measured in all detector designs. Measurements with 90Sr tracks show S/N = 21 on the detector p-side and S/N = 18 on the n-side.",
    author = "R. Brenner and I. Hietanen and J. Lindgren and R. Orava and C. R{\"o}nnqvist and T. Schulman and T. Tuura and Mikael Andersson and Kari Leinonen and Hannu Ronkainen",
    year = "1992",
    doi = "10.1016/0168-9002(92)90754-R",
    language = "English",
    volume = "315",
    pages = "502--506",
    journal = "Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",
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    publisher = "Elsevier",
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    Double-sided capacitively coupled silicon strip detectors on a 100 mm wafer. / Brenner, R.; Hietanen, I.; Lindgren, J.; Orava, R.; Rönnqvist, C.; Schulman, T.; Tuura, T.; Andersson, Mikael; Leinonen, Kari; Ronkainen, Hannu.

    In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 315, No. 1-3, 1992, p. 502-506.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Double-sided capacitively coupled silicon strip detectors on a 100 mm wafer

    AU - Brenner, R.

    AU - Hietanen, I.

    AU - Lindgren, J.

    AU - Orava, R.

    AU - Rönnqvist, C.

    AU - Schulman, T.

    AU - Tuura, T.

    AU - Andersson, Mikael

    AU - Leinonen, Kari

    AU - Ronkainen, Hannu

    PY - 1992

    Y1 - 1992

    N2 - Silicon strip detectors with double-sided readout have been designed and processed on 100 mm silicon wafers. Detectors with integrated coupling capacitors and polysilicon bias resistors were tested by static electrical measurements, laser illumination and with tracks from a 90Sr source. Strip separation on the detector n-side has been achieved by the use of capacitively coupled readout electrodes as field-plates. Interstrip resistance of > 10 Mω has been measured in all detector designs. Measurements with 90Sr tracks show S/N = 21 on the detector p-side and S/N = 18 on the n-side.

    AB - Silicon strip detectors with double-sided readout have been designed and processed on 100 mm silicon wafers. Detectors with integrated coupling capacitors and polysilicon bias resistors were tested by static electrical measurements, laser illumination and with tracks from a 90Sr source. Strip separation on the detector n-side has been achieved by the use of capacitively coupled readout electrodes as field-plates. Interstrip resistance of > 10 Mω has been measured in all detector designs. Measurements with 90Sr tracks show S/N = 21 on the detector p-side and S/N = 18 on the n-side.

    U2 - 10.1016/0168-9002(92)90754-R

    DO - 10.1016/0168-9002(92)90754-R

    M3 - Article

    VL - 315

    SP - 502

    EP - 506

    JO - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

    JF - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

    SN - 0168-9002

    IS - 1-3

    ER -