Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform

Research output: Contribution to journalArticleScientificpeer-review

96 Citations (Scopus)

Abstract

We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.
Original languageEnglish
Pages (from-to)17814-17823
JournalOptics Express
Volume21
Issue number15
DOIs
Publication statusPublished - 29 Jul 2013
MoE publication typeNot Eligible

Fingerprint

platforms
photonics
waveguides
silicon
radii
SOI (semiconductors)
optical waveguides
broadband

Cite this

@article{197b4f303c0f4abb9e13ae135e437873,
title = "Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform",
abstract = "We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.",
author = "Matteo Cherchi and Sami Ylinen and Mikko Harjanne and Markku Kapulainen and Timo Aalto",
year = "2013",
month = "7",
day = "29",
doi = "10.1364/OE.21.017814",
language = "English",
volume = "21",
pages = "17814--17823",
journal = "Optics Express",
issn = "1094-4087",
publisher = "Optical Society of America OSA",
number = "15",

}

Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform. / Cherchi, Matteo; Ylinen, Sami; Harjanne, Mikko; Kapulainen, Markku; Aalto, Timo.

In: Optics Express, Vol. 21, No. 15, 29.07.2013, p. 17814-17823.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Dramatic size reduction of waveguide bends on a micron-scale silicon photonic platform

AU - Cherchi, Matteo

AU - Ylinen, Sami

AU - Harjanne, Mikko

AU - Kapulainen, Markku

AU - Aalto, Timo

PY - 2013/7/29

Y1 - 2013/7/29

N2 - We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.

AB - We demonstrate theoretically and experimentally how highly multimodal high index contrast waveguides with micron-scale cores can be bent, on an ultra-broad band of operation, with bending radii below 10 µm and losses for the fundamental mode below 0.02 dB/90°. The bends have been designed based on the Euler spiral and fabricated on 4 µm thick SOI. The proposed approach enabled also the realization of 180° bends with 1.27 µm effective radii and 0.09 dB loss, which are the smallest low-loss bends ever reported for an optical waveguide. These results pave the way for unprecedented integration density in most semiconductor platforms.

U2 - 10.1364/OE.21.017814

DO - 10.1364/OE.21.017814

M3 - Article

C2 - 23938654

VL - 21

SP - 17814

EP - 17823

JO - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 15

ER -