Driving circuits for a piezoelectric microelectromechanical system mirror

Tapio Pernu

Driving circuits for a piezoelectric microelectromechanical system mirror

Tapio Pernu (Inventor)

BA6201 RF microsystems

Research output: Patent › Patent

Abstract

According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators.

Patent family as of 21.7.2026
EP4066041 A1, FI20196026 A, US12434960 BB, US12497284 BB, US2022411255 AA, WO21105568 A1

Original language	English
Patent number	US12497284 B2
IPC	B81B3/00
Priority date	28/11/19
Filing date	27/11/20
Publication status	Published - 7 Oct 2025
MoE publication type	H1 Granted patent

Cite this

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abstract = "According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators. Patent family as of 21.7.2026 EP4066041 A1, FI20196026 A, US12434960 BB, US12497284 BB, US2022411255 AA, WO21105568 A1",

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N2 - According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators. Patent family as of 21.7.2026 EP4066041 A1, FI20196026 A, US12434960 BB, US12497284 BB, US2022411255 AA, WO21105568 A1

AB - According to an example aspect of the present invention, there is provided a Microelectromechanical System, MEMS, mirror apparatus, comprising a MEMS mirror and at least two piezo actuators, wherein the at least two piezo actuators are connected to each other and configured to control, or controlling, movement of the MEMS mirror and a single supply drive signal connected to each of the at least two piezo actuators. Patent family as of 21.7.2026 EP4066041 A1, FI20196026 A, US12434960 BB, US12497284 BB, US2022411255 AA, WO21105568 A1

UR - https://fi.espacenet.com/publicationDetails/biblio?II=0&ND=3&adjacent=true&locale=fi_FI&FT=D&date=20221229&CC=US&NR=2022411255A1&KC=A1

M3 - Patent

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ER -

Driving circuits for a piezoelectric microelectromechanical system mirror

Abstract

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