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Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses
Kimmo Solehmainen, Timo Aalto, James Dekker, Markku Kapulainen, Mikko Harjanne, Kaupo Kukli, Päivi Heimala, Kai Kolari, Markku Leskelä
Research output: Contribution to journal › Article › Scientific › peer-review
35
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(Scopus)