Dry etching of titanium

Markku Ranta

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Professional

Original language	English
Title of host publication	7th International Symposium on Plasma Chemistry (ISPC-7)
Editors	C.J. Timmermans
Place of Publication	Eindhoven
Publisher	Eindhoven University of Technology
Pages	966-970
Volume	1
Publication status	Published - 1985
MoE publication type	D3 Professional conference proceedings
Event	7th International Symposium on Plasma Chemistry (ISPC-7) - Eindhoven, Netherlands Duration: 1 Jul 1985 → 5 Jul 1985

Conference	7th International Symposium on Plasma Chemistry (ISPC-7)
Country/Territory	Netherlands
City	Eindhoven
Period	1/07/85 → 5/07/85

Access to Document

@inproceedings{314bd3e9ca5f4ed68e1b29bb02813154,

title = "Dry etching of titanium",

author = "Markku Ranta",

year = "1985",

language = "English",

volume = "1",

pages = "966--970",

editor = "C.J. Timmermans",

booktitle = "7th International Symposium on Plasma Chemistry (ISPC-7)",

publisher = "Eindhoven University of Technology",

address = "Netherlands",

note = "7th International Symposium on Plasma Chemistry (ISPC-7) ; Conference date: 01-07-1985 Through 05-07-1985",

}

TY - GEN

T1 - Dry etching of titanium

AU - Ranta, Markku

PY - 1985

Y1 - 1985

M3 - Conference article in proceedings

VL - 1

SP - 966

EP - 970

BT - 7th International Symposium on Plasma Chemistry (ISPC-7)

A2 - Timmermans, C.J.

PB - Eindhoven University of Technology

CY - Eindhoven

T2 - 7th International Symposium on Plasma Chemistry (ISPC-7)

Y2 - 1 July 1985 through 5 July 1985

ER -