Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures

I. Maximov, Shorubalko, M. Beck, W. Seifert, L. Montelius, S. Zankovych, J. Seekamp, S. Romanov, H.C. Scheer, C.M. Sotomayor Torres, D. Reuter, P. Schafmeister, A.D. Wieck, Ch. Cardinaud, G. Grueztner, C. Mayer, Jouni Ahopelto

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002
Place of PublicationSan Francisco
PublisherNaval Research Laboratory
Pages111-112
Publication statusPublished - 2002
Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
Duration: 11 Dec 200213 Dec 2002
http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated titleNNT 2002
CountryUnited States
CitySan Francisco
Period11/12/0213/12/02
Internet address

Keywords

  • Nanoimprint Lithography
  • quantum wells

Cite this

Maximov, I., Shorubalko, Beck, M., Seifert, W., Montelius, L., Zankovych, S., Seekamp, J., Romanov, S., Scheer, H. C., Sotomayor Torres, C. M., Reuter, D., Schafmeister, P., Wieck, A. D., Cardinaud, C., Grueztner, G., Mayer, C., & Ahopelto, J. (2002). Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002 (pp. 111-112). Naval Research Laboratory.