Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures

I. Maximov; Shorubalko; M. Beck; W. Seifert; L. Montelius; S. Zankovych; J. Seekamp; S. Romanov; H.C. Scheer; C.M. Sotomayor Torres; D. Reuter; P. Schafmeister; A.D. Wieck; Ch. Cardinaud; G. Grueztner; C. Mayer; Jouni Ahopelto

Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures

I. Maximov
, Shorubalko
, M. Beck
, W. Seifert
, L. Montelius
, S. Zankovych
, J. Seekamp
, S. Romanov
, H.C. Scheer
, C.M. Sotomayor Torres
, D. Reuter
, P. Schafmeister
, A.D. Wieck
, Ch. Cardinaud
, G. Grueztner
, C. Mayer
, Jouni Ahopelto

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	111-112
Publication status	Published - 2002
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography
quantum wells

Cite this

Maximov, I., Shorubalko, Beck, M., Seifert, W., Montelius, L., Zankovych, S., Seekamp, J., Romanov, S., Scheer, H. C., Sotomayor Torres, C. M., Reuter, D., Schafmeister, P., Wieck, A. D., Cardinaud, C., Grueztner, G., Mayer, C., & Ahopelto, J. (2002). Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002 (pp. 111-112). Naval Research Laboratory.

Maximov, I. ; Shorubalko ; Beck, M. et al. / Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco : Naval Research Laboratory, 2002. pp. 111-112

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title = "Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures",

keywords = "Nanoimprint Lithography, quantum wells",

author = "I. Maximov and Shorubalko and M. Beck and W. Seifert and L. Montelius and S. Zankovych and J. Seekamp and S. Romanov and H.C. Scheer and \{Sotomayor Torres\}, C.M. and D. Reuter and P. Schafmeister and A.D. Wieck and Ch. Cardinaud and G. Grueztner and C. Mayer and Jouni Ahopelto",

year = "2002",

language = "English",

pages = "111--112",

booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Maximov, I, Shorubalko, Beck, M, Seifert, W, Montelius, L, Zankovych, S, Seekamp, J, Romanov, S, Scheer, HC, Sotomayor Torres, CM, Reuter, D, Schafmeister, P, Wieck, AD, Cardinaud, C, Grueztner, G, Mayer, C & Ahopelto, J 2002, Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. Naval Research Laboratory, San Francisco, pp. 111-112, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. / Maximov, I.; Shorubalko; Beck, M. et al.
Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco: Naval Research Laboratory, 2002. p. 111-112.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures

AU - Maximov, I.

AU - Shorubalko, null

AU - Beck, M.

AU - Seifert, W.

AU - Montelius, L.

AU - Zankovych, S.

AU - Seekamp, J.

AU - Romanov, S.

AU - Scheer, H.C.

AU - Sotomayor Torres, C.M.

AU - Reuter, D.

AU - Schafmeister, P.

AU - Wieck, A.D.

AU - Cardinaud, Ch.

AU - Grueztner, G.

AU - Mayer, C.

AU - Ahopelto, Jouni

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

KW - quantum wells

M3 - Conference abstract in proceedings

SP - 111

EP - 112

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -

Maximov I, Shorubalko, Beck M, Seifert W, Montelius L, Zankovych S et al. Effect of nanoimprint lithography on electrical and optical properties of GaInAs/InP and AlGaAs/GaAs Quantum well structures. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference, San Francisco, CA, 11-13 Dec, 2002. San Francisco: Naval Research Laboratory. 2002. p. 111-112