Effect of Oxygen on the reactions in the Si/Ta/Cu metallization system

  • Tomi Laurila
  • , Kejun Zeng
  • , Jorma Kivilahti
  • , Jyrki Molarius
  • , Ilkka Suni

Research output: Contribution to journal › Article › Scientific › peer-review

29 Citations (Scopus)

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Engineering

Material Science

Chemical Engineering

Food Science