Effect of preamorphization depth on channeling tails in B+ and As+ implanted silicon

Ilkka Suni, Hannu Ronkainen, Simo Eränen, Timo Murto, Christos Krontiras, Manuela Finetti

    Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

    Fingerprint

    Dive into the research topics of 'Effect of preamorphization depth on channeling tails in B+ and As+ implanted silicon'. Together they form a unique fingerprint.
    Sort by

    INIS

    Keyphrases

    Engineering

    Chemistry

    Material Science