@inproceedings{f988884567234b5fa2a8245689891ed0,
title = "Effect of surfactants on particle contamination of silicon surface in HF solutions",
author = "Tapani Vehmas and Heini Ritala and Oili Anttila",
note = "PNA: Saloniemi; 8th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing : Part of the 204th ECS Meeting ; Conference date: 12-10-2003 Through 16-10-2003",
year = "2004",
language = "English",
isbn = "1-56677-411-X",
series = "ECS Proceedings Volumes",
publisher = "Electrochemical Society ECS",
pages = "195--202",
editor = "J. Ruzyllo and T. Hattori and Opila, {R. L.} and Novak, {R. E.}",
booktitle = "Cleaning Technology in Semiconductor Device Manufacturing VIII",
address = "United States",
}