Effects of plasma activation on hydrophilic bonding of Si and Si02

Tommi Suni (Corresponding Author), Kimmo Henttinen, Ilkka Suni, J. Mäkinen

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Low-temperature bonding of Si wafers has been studied utilizing reactive ion etching-mode plasma activation. The hydrophilic Si and thermally oxidized Si wafers were exposed to N2, Ar, or O2 plasma prior to bonding in air or vacuum. After plasma treatment the wafers were cleaned in RCA-1 solution and/or deionized water.
Strong bonding was achieved at 200°C with all the investigated plasma gases, if proper bonding and cleaning procedures were used. Extended RCA-1 cleaning deteriorated the bond strength, but a short cleaning improved bonding. We found that the activation of the thermal oxide has a larger influence on the bond strength than the activation of the native oxide surface in Si/oxide wafer pairs.
We suggest that the plasma treatment induces a highly disordered surface structure, which enhances the diffusion of the water from the bonded interface. As a result of the plasma exposure the number of the surface OH groups is greatly increased enabling strong bonding at a low temperature
Original languageEnglish
Pages (from-to)G348-G351
JournalJournal of the Electrochemical Society
Volume49
Issue number6
DOIs
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

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Chemical activation
Plasmas
Oxides
Cleaning
Plasma Gases
Deionized water
Reactive ion etching
Surface structure
Vacuum
Temperature
Water
Air
Gases

Cite this

Suni, Tommi ; Henttinen, Kimmo ; Suni, Ilkka ; Mäkinen, J. / Effects of plasma activation on hydrophilic bonding of Si and Si02. In: Journal of the Electrochemical Society. 2002 ; Vol. 49, No. 6. pp. G348-G351.
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Effects of plasma activation on hydrophilic bonding of Si and Si02. / Suni, Tommi (Corresponding Author); Henttinen, Kimmo; Suni, Ilkka; Mäkinen, J.

In: Journal of the Electrochemical Society, Vol. 49, No. 6, 2002, p. G348-G351.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Effects of plasma activation on hydrophilic bonding of Si and Si02

AU - Suni, Tommi

AU - Henttinen, Kimmo

AU - Suni, Ilkka

AU - Mäkinen, J.

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PY - 2002

Y1 - 2002

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AB - Low-temperature bonding of Si wafers has been studied utilizing reactive ion etching-mode plasma activation. The hydrophilic Si and thermally oxidized Si wafers were exposed to N2, Ar, or O2 plasma prior to bonding in air or vacuum. After plasma treatment the wafers were cleaned in RCA-1 solution and/or deionized water. Strong bonding was achieved at 200°C with all the investigated plasma gases, if proper bonding and cleaning procedures were used. Extended RCA-1 cleaning deteriorated the bond strength, but a short cleaning improved bonding. We found that the activation of the thermal oxide has a larger influence on the bond strength than the activation of the native oxide surface in Si/oxide wafer pairs.We suggest that the plasma treatment induces a highly disordered surface structure, which enhances the diffusion of the water from the bonded interface. As a result of the plasma exposure the number of the surface OH groups is greatly increased enabling strong bonding at a low temperature

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