Effects of plasma activation on hydrophilic bonding of si and SiO2
- Tommi Suni*
- , Kimmo Henttinen
- , Ilkka Suni
- , Jari Mäkinen
*Corresponding author for this work
- VTT (former employee or external)
- Okmetic Oy
Research output: Contribution to journal › Article › Scientific › peer-review
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