Elastic recoil and scattering yields measured in low energy heavy ion ERD

Mikko Kivekäs; Kenichiro Mizohata; Jaakko Julin; Markku Kainlauri; Mika Prunnila; Laura Keränen; Matti Putkonen; Tatu Korkiamäki; Mikko Laitinen

doi:10.1016/j.nimb.2024.165542

Elastic recoil and scattering yields measured in low energy heavy ion ERD

Mikko Kivekäs^*
, Kenichiro Mizohata
, Jaakko Julin
, Markku Kainlauri
, Mika Prunnila
, Laura Keränen
, Matti Putkonen
, Tatu Korkiamäki
, Mikko Laitinen

^*Corresponding author for this work

University of Jyväskylä
University of Helsinki

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)

Abstract

Experimental yields of low energy recoils and scattered beams in ToF-ERD have been measured and compared against theory. A significant discrepancy between Rutherford or Andersen cross-section predicted yield vs the experimental results is now demonstrated. Scale of the discrepancy is up to 50% compared to yields predicted by theory for low energy Au recoils. MCERD simulations were used to study the carbon foil scattering in the timing detectors to explain the observed discrepancy. Simulations indicate that a major part of the discrepancy occurs due to the scattering of low energy, heavy mass particles in the timing detector foils. The yield discrepancy can be narrowed down by taking into account the reduction of recoil yields caused by the carbon foil scattering. Further studies are in progress to study carbon foil scattering, aiming to further improve the quantitativity of ToF-ERD for the heavy elements.

Original language	English
Article number	165542
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	557
DOIs	https://doi.org/10.1016/j.nimb.2024.165542
Publication status	Published - Dec 2024
MoE publication type	A1 Journal article-refereed

Funding

This work had been funded by the Academy of Finland's Academy Research Fellow grant No. 330283, 336354 and 358145. The use of ALD center Finland research infrastructure and funding from the Academy of Finland by the profiling action on Matter and Materials, grant no. 318913. Jane and Aatos Erkko Foundation, Finland funding are acknowledged (Project: Novel materials for energy efficient microelectronics).

Keywords

Carbon foils
Depth profiling
Low energy heavy recoils
Scattering
Thin film analysis
Time-of-flight
ToF-ERD

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Kivekäs, M., Mizohata, K., Julin, J., Kainlauri, M., Prunnila, M., Keränen, L., Putkonen, M., Korkiamäki, T., & Laitinen, M. (2024). Elastic recoil and scattering yields measured in low energy heavy ion ERD. Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms, 557, Article 165542. https://doi.org/10.1016/j.nimb.2024.165542

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abstract = "Experimental yields of low energy recoils and scattered beams in ToF-ERD have been measured and compared against theory. A significant discrepancy between Rutherford or Andersen cross-section predicted yield vs the experimental results is now demonstrated. Scale of the discrepancy is up to 50\% compared to yields predicted by theory for low energy Au recoils. MCERD simulations were used to study the carbon foil scattering in the timing detectors to explain the observed discrepancy. Simulations indicate that a major part of the discrepancy occurs due to the scattering of low energy, heavy mass particles in the timing detector foils. The yield discrepancy can be narrowed down by taking into account the reduction of recoil yields caused by the carbon foil scattering. Further studies are in progress to study carbon foil scattering, aiming to further improve the quantitativity of ToF-ERD for the heavy elements.",

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AU - Kivekäs, Mikko

AU - Mizohata, Kenichiro

AU - Julin, Jaakko

AU - Kainlauri, Markku

AU - Prunnila, Mika

AU - Keränen, Laura

AU - Putkonen, Matti

AU - Korkiamäki, Tatu

AU - Laitinen, Mikko

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N2 - Experimental yields of low energy recoils and scattered beams in ToF-ERD have been measured and compared against theory. A significant discrepancy between Rutherford or Andersen cross-section predicted yield vs the experimental results is now demonstrated. Scale of the discrepancy is up to 50% compared to yields predicted by theory for low energy Au recoils. MCERD simulations were used to study the carbon foil scattering in the timing detectors to explain the observed discrepancy. Simulations indicate that a major part of the discrepancy occurs due to the scattering of low energy, heavy mass particles in the timing detector foils. The yield discrepancy can be narrowed down by taking into account the reduction of recoil yields caused by the carbon foil scattering. Further studies are in progress to study carbon foil scattering, aiming to further improve the quantitativity of ToF-ERD for the heavy elements.

AB - Experimental yields of low energy recoils and scattered beams in ToF-ERD have been measured and compared against theory. A significant discrepancy between Rutherford or Andersen cross-section predicted yield vs the experimental results is now demonstrated. Scale of the discrepancy is up to 50% compared to yields predicted by theory for low energy Au recoils. MCERD simulations were used to study the carbon foil scattering in the timing detectors to explain the observed discrepancy. Simulations indicate that a major part of the discrepancy occurs due to the scattering of low energy, heavy mass particles in the timing detector foils. The yield discrepancy can be narrowed down by taking into account the reduction of recoil yields caused by the carbon foil scattering. Further studies are in progress to study carbon foil scattering, aiming to further improve the quantitativity of ToF-ERD for the heavy elements.

KW - Carbon foils

KW - Depth profiling

KW - Low energy heavy recoils

KW - Scattering

KW - Thin film analysis

KW - Time-of-flight

KW - ToF-ERD

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JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

M1 - 165542

ER -

Elastic recoil and scattering yields measured in low energy heavy ion ERD

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