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Electrical and mechanical properties of micromachined vacuum cavities
Jyrki Kiihamäki
*
, Hannu Ronkainen
, Ari Häärä
,
Tomi Mattila
*
Corresponding author for this work
BA62 Microelectronics and quantum technology
BA6208 Quantum computing hardware
Research output
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Article
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Scientific
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peer-review
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Keyphrases
Mechanical Properties
100%
Electrical Properties
100%
Silicon-on-insulator
100%
Micromachining
100%
Vacuum Cavity
100%
Resonator
66%
Internal Stress
66%
Design Process
33%
Design Parameters
33%
Material Properties
33%
Multicrystalline Silicon
33%
Moving Parts
33%
Single Crystal
33%
Oxide Layer
33%
Integrated Circuits
33%
Parameter Variation
33%
Surface Micromachining
33%
Silicon Material
33%
Surface Quality
33%
Silicon-on-insulator Wafer
33%
Low Pressure Chemical Vapor Deposition (LPCVD)
33%
Insulator Substrate
33%
Process Variation
33%
Polysilicon
33%
Stiction
33%
Aluminum Metallization
33%
Hydrofluoric Acid
33%
Mechanical Loss
33%
Microelectromechanical Devices
33%
Micromechanical Devices
33%
Sacrificial Oxide
33%
Microring Resonator
33%
Cavity Structure
33%
Monolithical Integration
33%
Acoustic Damping
33%
Elastic Rigidity
33%
Cavity Resonators
33%
INIS
silicon
100%
mechanical properties
100%
electrical properties
100%
cavities
100%
surfaces
33%
single crystals
33%
devices
33%
chemical vapor deposition
33%
residual stresses
33%
resonators
33%
layers
16%
geometry
16%
design
16%
aluminium
16%
substrates
16%
oxides
16%
losses
16%
variations
16%
damping
16%
machining
16%
acoustics
16%
integrated circuits
16%
plugs
16%
immunity
16%
etching
16%
hydrofluoric acid
16%
cavity resonators
16%
Engineering
Silicon on Insulator
100%
Resonator
75%
Internal Stress
50%
Design Parameter
25%
Moving Part
25%
Design Process
25%
Oxide Layer
25%
Surface Micro-Machining
25%
Metallizations
25%
Surface Quality
25%
Silicon Single Crystal
25%
Parameter Variation
25%
Silicon Material
25%
Microelectromechanical System
25%
Chemical Vapor Deposition
25%
Realization
25%
Rigidity
25%
Stiction
25%
Integrated Circuit
25%
Polysilicon
25%
Mechanical Loss
25%
Process Variation
25%
Material Science
Silicon
100%
Resonator
60%
Single Crystal
40%
Surface Property
20%
Silicon Material
20%
Chemical Vapor Deposition
20%
Electronic Circuit
20%
Micromachining
20%
Materials Property
20%
Microelectromechanical System
20%
Low Pressure Chemical Vapor Deposition
20%
Surface (Surface Science)
20%
Aluminum
20%
Oxide Compound
20%
Rigidity
20%