Electrical measurements of planarization efficiency in a multilevel metal process

Nina Pirilä, Sami Franssila, Hannu Kattelus, Hannu Ronkainen

    Research output: Contribution to conferenceConference articleScientific

    Original languageEnglish
    PagesE-64
    Publication statusPublished - 1998
    MoE publication typeNot Eligible
    Event18th Nordic Semiconductor Meeting, NSM18 - Linköping, Sweden
    Duration: 8 Jun 199810 Jun 1998

    Conference

    Conference18th Nordic Semiconductor Meeting, NSM18
    CountrySweden
    CityLinköping
    Period8/06/9810/06/98

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