Electrical measurements of planarization efficiency in a multilevel metal process

Nina Pirilä; Sami Franssila; Hannu Kattelus; Hannu Ronkainen

Electrical measurements of planarization efficiency in a multilevel metal process

Nina Pirilä, Sami Franssila, Hannu Kattelus, Hannu Ronkainen

Research output: Contribution to conference › Conference article › Scientific

Original language	English
Pages	E-64
Publication status	Published - 1998
MoE publication type	Not Eligible
Event	18th Nordic Semiconductor Meeting, NSM18 - Linköping, Sweden Duration: 8 Jun 1998 → 10 Jun 1998

Conference

Conference	18th Nordic Semiconductor Meeting, NSM18
Country/Territory	Sweden
City	Linköping
Period	8/06/98 → 10/06/98

Cite this

@conference{7bc95555318d4972bbbee7165b5f5e7b,

title = "Electrical measurements of planarization efficiency in a multilevel metal process",

author = "Nina Piril{\"a} and Sami Franssila and Hannu Kattelus and Hannu Ronkainen",

note = "Not published in the proceedings https://iopscience.iop.org/issue/1402-4896/1999/T79; 18th Nordic Semiconductor Meeting, NSM18 ; Conference date: 08-06-1998 Through 10-06-1998",

year = "1998",

language = "English",

pages = "E--64",

}

TY - CONF

T1 - Electrical measurements of planarization efficiency in a multilevel metal process

AU - Pirilä, Nina

AU - Franssila, Sami

AU - Kattelus, Hannu

AU - Ronkainen, Hannu

N1 - Not published in the proceedings https://iopscience.iop.org/issue/1402-4896/1999/T79

PY - 1998

Y1 - 1998

M3 - Conference article

SP - E-64

T2 - 18th Nordic Semiconductor Meeting, NSM18

Y2 - 8 June 1998 through 10 June 1998

ER -