Electrical properties of atomic layer deposited (ALD) TiO2 films

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	MAM-2006
Subtitle of host publication	Book of Abstracts
Pages	258-259
Publication status	Published - 2006
Event	MAM-2006: Materials for Advanced Metallization - Grenoble, Switzerland Duration: 6 Mar 2006 → 8 Mar 2006

Conference	MAM-2006: Materials for Advanced Metallization
Country/Territory	Switzerland
City	Grenoble
Period	6/03/06 → 8/03/06

Cite this

@inbook{d620b0c1bd3e4d38862b110061827673,

title = "Electrical properties of atomic layer deposited (ALD) TiO2 films",

author = "Jaakko Saarilahti and Hannu Kattelus and Hannu Luoto",

year = "2006",

language = "English",

pages = "258--259",

booktitle = "MAM-2006",

note = "MAM-2006: Materials for Advanced Metallization ; Conference date: 06-03-2006 Through 08-03-2006",

}