This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.
- microelectromechanical systems
- capacitive sensors
- built-in voltage
- AC voltage reference
- oxide charging