Electrical stability of a MEMS-based AC voltage reference

Anu Kärkkäinen; Nikolai Tisnek; Antti Manninen; Nadine Pesonen; Aarne S. Oja; Heikki Seppä

doi:10.1016/j.sna.2007.02.033

Electrical stability of a MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nikolai Tisnek, Antti Manninen, Nadine Pesonen, Aarne S. Oja, Heikki Seppä

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.

Original language	English
Pages (from-to)	169-174
Journal	Sensors and Actuators A: Physical
Volume	137
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2007.02.033
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

microelectromechanical systems
MEMS
capacitive sensors
micromachining
built-in voltage
AC voltage reference
oxide charging

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2007.02.033

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title = "Electrical stability of a MEMS-based AC voltage reference",

abstract = "This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.",

keywords = "microelectromechanical systems, MEMS, capacitive sensors, micromachining, built-in voltage, AC voltage reference, oxide charging",

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T1 - Electrical stability of a MEMS-based AC voltage reference

AU - Kärkkäinen, Anu

AU - Tisnek, Nikolai

AU - Manninen, Antti

AU - Pesonen, Nadine

AU - Oja, Aarne S.

AU - Seppä, Heikki

PY - 2007

Y1 - 2007

N2 - This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.

AB - This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.

KW - microelectromechanical systems

KW - MEMS

KW - capacitive sensors

KW - micromachining

KW - built-in voltage

KW - AC voltage reference

KW - oxide charging

U2 - 10.1016/j.sna.2007.02.033

DO - 10.1016/j.sna.2007.02.033

M3 - Article

SN - 0924-4247

VL - 137

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EP - 174

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1

ER -

Electrical stability of a MEMS-based AC voltage reference

Abstract

Keywords

UN SDGs

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