Electrical stability of a MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nikolai Tisnek, Antti Manninen, Nadine Pesonen, Aarne S. Oja, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    13 Citations (Scopus)

    Abstract

    This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.
    Original languageEnglish
    Pages (from-to)169-174
    JournalSensors and Actuators A: Physical
    Volume137
    Issue number1
    DOIs
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

    Keywords

    • microelectromechanical systems
    • MEMS
    • capacitive sensors
    • micromachining
    • built-in voltage
    • AC voltage reference
    • oxide charging

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