Electrical stability of a MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nikolai Tisnek, Antti Manninen, Nadine Pesonen, Aarne S. Oja, Heikki Seppä

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13 Citations (Scopus)

Abstract

This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.
Original languageEnglish
Pages (from-to)169-174
JournalSensors and Actuators A: Physical
Volume137
Issue number1
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

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Keywords

  • microelectromechanical systems
  • MEMS
  • capacitive sensors
  • micromachining
  • built-in voltage
  • AC voltage reference
  • oxide charging

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