Electrical stability of a MEMS-based AC voltage reference

Anu Kärkkäinen (Corresponding Author), Nikolai Tisnek, Antti Manninen, Nadine Pesonen, Aarne S. Oja, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)

Abstract

This paper studies the electric stability of a MEMS-based AC voltage reference. The operation of the device is based on the characteristic pull-in phenomenon of a moving plate capacitor. The stability of a MEMS-based AC voltage reference was improved from 3 ppm/day to below 2 ppm/22 days by compensating the built-in voltage with an external DC voltage source. This level of performance is sufficient for several applications and is outstanding compared to results published earlier.
Original languageEnglish
Pages (from-to)169-174
JournalSensors and Actuators A: Physical
Volume137
Issue number1
DOIs
Publication statusPublished - 2007
MoE publication typeA1 Journal article-refereed

Fingerprint

microelectromechanical systems
MEMS
alternating current
Electric potential
electric potential
capacitors
Capacitors
direct current

Keywords

  • microelectromechanical systems
  • MEMS
  • capacitive sensors
  • micromachining
  • built-in voltage
  • AC voltage reference
  • oxide charging

Cite this

Kärkkäinen, Anu ; Tisnek, Nikolai ; Manninen, Antti ; Pesonen, Nadine ; Oja, Aarne S. ; Seppä, Heikki. / Electrical stability of a MEMS-based AC voltage reference. In: Sensors and Actuators A: Physical. 2007 ; Vol. 137, No. 1. pp. 169-174.
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Electrical stability of a MEMS-based AC voltage reference. / Kärkkäinen, Anu (Corresponding Author); Tisnek, Nikolai; Manninen, Antti; Pesonen, Nadine; Oja, Aarne S.; Seppä, Heikki.

In: Sensors and Actuators A: Physical, Vol. 137, No. 1, 2007, p. 169-174.

Research output: Contribution to journalArticleScientificpeer-review

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T1 - Electrical stability of a MEMS-based AC voltage reference

AU - Kärkkäinen, Anu

AU - Tisnek, Nikolai

AU - Manninen, Antti

AU - Pesonen, Nadine

AU - Oja, Aarne S.

AU - Seppä, Heikki

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KW - MEMS

KW - capacitive sensors

KW - micromachining

KW - built-in voltage

KW - AC voltage reference

KW - oxide charging

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