Electrically tunable NIR spectrometer

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
PublisherInternational Society for Optics and Photonics SPIE
Pages181-184
Number of pages4
ISBN (Print)0819425192
Publication statusPublished - 1997
MoE publication typeA4 Article in a conference publication
EventMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications - Munich, Germany
Duration: 16 Jun 199716 Jun 1997

Publication series

SeriesProceedings of SPIE - The International Society for Optical Engineering
Volume3099
ISSN0277-786X

Conference

ConferenceMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications
CountryGermany
CityMunich
Period16/06/9716/06/97

Fingerprint

Fabry-Perot Interferometer
Fabry-Perot interferometers
Spectrometer
Spectrometers
spectrometers
Silicon
mounting
Mountings
Substrate
Mechanical Stress
Thermal Expansion
Elastic Material
Packaging
silicon
Substrates
packaging
Thermal expansion
thermal expansion
manufacturing
Manufacturing

Cite this

Keraenen, K., Karioja, P., Rusanen, O., Tenhunen, J., Blomberg, M., & Lehto, A. (1997). Electrically tunable NIR spectrometer. In Proceedings of SPIE - The International Society for Optical Engineering (pp. 181-184). International Society for Optics and Photonics SPIE. Proceedings of SPIE - The International Society for Optical Engineering, Vol.. 3099
Keraenen, Kimmo ; Karioja, Pentti ; Rusanen, Outi ; Tenhunen, Jussi ; Blomberg, Martti ; Lehto, Ari. / Electrically tunable NIR spectrometer. Proceedings of SPIE - The International Society for Optical Engineering. International Society for Optics and Photonics SPIE, 1997. pp. 181-184 (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3099).
@inproceedings{bc90eb289b4f425cba91cebdba49d912,
title = "Electrically tunable NIR spectrometer",
abstract = "The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.",
author = "Kimmo Keraenen and Pentti Karioja and Outi Rusanen and Jussi Tenhunen and Martti Blomberg and Ari Lehto",
year = "1997",
language = "English",
isbn = "0819425192",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "International Society for Optics and Photonics SPIE",
pages = "181--184",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
address = "United States",

}

Keraenen, K, Karioja, P, Rusanen, O, Tenhunen, J, Blomberg, M & Lehto, A 1997, Electrically tunable NIR spectrometer. in Proceedings of SPIE - The International Society for Optical Engineering. International Society for Optics and Photonics SPIE, Proceedings of SPIE - The International Society for Optical Engineering, vol. 3099, pp. 181-184, Micro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications, Munich, Germany, 16/06/97.

Electrically tunable NIR spectrometer. / Keraenen, Kimmo; Karioja, Pentti; Rusanen, Outi; Tenhunen, Jussi; Blomberg, Martti; Lehto, Ari.

Proceedings of SPIE - The International Society for Optical Engineering. International Society for Optics and Photonics SPIE, 1997. p. 181-184 (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3099).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Electrically tunable NIR spectrometer

AU - Keraenen, Kimmo

AU - Karioja, Pentti

AU - Rusanen, Outi

AU - Tenhunen, Jussi

AU - Blomberg, Martti

AU - Lehto, Ari

PY - 1997

Y1 - 1997

N2 - The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

AB - The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

UR - http://www.scopus.com/inward/record.url?scp=0031328791&partnerID=8YFLogxK

M3 - Conference article in proceedings

AN - SCOPUS:0031328791

SN - 0819425192

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 181

EP - 184

BT - Proceedings of SPIE - The International Society for Optical Engineering

PB - International Society for Optics and Photonics SPIE

ER -

Keraenen K, Karioja P, Rusanen O, Tenhunen J, Blomberg M, Lehto A. Electrically tunable NIR spectrometer. In Proceedings of SPIE - The International Society for Optical Engineering. International Society for Optics and Photonics SPIE. 1997. p. 181-184. (Proceedings of SPIE - The International Society for Optical Engineering, Vol. 3099).