Abstract
We present a new kind of electrostatically tunable
surface micromachined Fabry-Perot interferometer
(FPI) structure and a process flow which was successfully
used to fabricate devices for visible wavelength range.
The novel fabrication process is based on using polymeric
sacrificial layer. Fabricated devices have five-layer
dielectric mirrors made of atomic layer deposited Al2O3
and TiO2 thin films. An AC voltage control together with
integrated series capacitance simplifies the fabrication
process and enables extension of the tuning range of the
FPI. The FWHM (full width at half maximum) of the 5th
order transmission is 5.4nm with maximum transmission
being about 67% at = 510 nm. The maximum transmission
was limited by widening of the transmission peaks due to
bending of the mirrors.
Original language | English |
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Pages (from-to) | 184-188 |
Journal | Sensors and Actuators A: Physical |
Volume | 162 |
Issue number | 2 |
DOIs | |
Publication status | Published - 2010 |
MoE publication type | A1 Journal article-refereed |
Keywords
- Fabry-Perot
- MEMS
- Tunable