Electrically tunable surface micromachined Fabry-Perot interferometer for visible light

Martti Blomberg, Hannu Kattelus, Akseli Miranto

Research output: Contribution to journalArticleScientificpeer-review

26 Citations (Scopus)

Abstract

We present a new kind of electrostatically tunable surface micromachined Fabry-Perot interferometer (FPI) structure and a process flow which was successfully used to fabricate devices for visible wavelength range. The novel fabrication process is based on using polymeric sacrificial layer. Fabricated devices have five-layer dielectric mirrors made of atomic layer deposited Al2O3 and TiO2 thin films. An AC voltage control together with integrated series capacitance simplifies the fabrication process and enables extension of the tuning range of the FPI. The FWHM (full width at half maximum) of the 5th order transmission is 5.4nm with maximum transmission being about 67% at = 510 nm. The maximum transmission was limited by widening of the transmission peaks due to bending of the mirrors.
Original languageEnglish
Pages (from-to)184-188
JournalSensors and Actuators A: Physical
Volume162
Issue number2
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Fingerprint

Fabry-Perot interferometers
mirrors
Fabrication
fabrication
Full width at half maximum
Voltage control
alternating current
Capacitance
Tuning
capacitance
tuning
Thin films
Wavelength
electric potential
thin films
wavelengths

Keywords

  • Fabry-Perot
  • MEMS
  • Tunable

Cite this

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abstract = "We present a new kind of electrostatically tunable surface micromachined Fabry-Perot interferometer (FPI) structure and a process flow which was successfully used to fabricate devices for visible wavelength range. The novel fabrication process is based on using polymeric sacrificial layer. Fabricated devices have five-layer dielectric mirrors made of atomic layer deposited Al2O3 and TiO2 thin films. An AC voltage control together with integrated series capacitance simplifies the fabrication process and enables extension of the tuning range of the FPI. The FWHM (full width at half maximum) of the 5th order transmission is 5.4nm with maximum transmission being about 67{\%} at = 510 nm. The maximum transmission was limited by widening of the transmission peaks due to bending of the mirrors.",
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Electrically tunable surface micromachined Fabry-Perot interferometer for visible light. / Blomberg, Martti; Kattelus, Hannu; Miranto, Akseli.

In: Sensors and Actuators A: Physical, Vol. 162, No. 2, 2010, p. 184-188.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Electrically tunable surface micromachined Fabry-Perot interferometer for visible light

AU - Blomberg, Martti

AU - Kattelus, Hannu

AU - Miranto, Akseli

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PY - 2010

Y1 - 2010

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AB - We present a new kind of electrostatically tunable surface micromachined Fabry-Perot interferometer (FPI) structure and a process flow which was successfully used to fabricate devices for visible wavelength range. The novel fabrication process is based on using polymeric sacrificial layer. Fabricated devices have five-layer dielectric mirrors made of atomic layer deposited Al2O3 and TiO2 thin films. An AC voltage control together with integrated series capacitance simplifies the fabrication process and enables extension of the tuning range of the FPI. The FWHM (full width at half maximum) of the 5th order transmission is 5.4nm with maximum transmission being about 67% at = 510 nm. The maximum transmission was limited by widening of the transmission peaks due to bending of the mirrors.

KW - Fabry-Perot

KW - MEMS

KW - Tunable

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VL - 162

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JO - Sensors and Actuators A: Physical

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