Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

Martti Blomberg, Hannu Kattelus, Akseli Miranto

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the Eurosensors XXIII conference
PublisherElsevier
Pages552-555
DOIs
Publication statusPublished - 2009
MoE publication typeA4 Article in a conference publication
Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
Duration: 6 Sep 20099 Sep 2009

Publication series

SeriesProcedia Chemistry
Number1
Volume1
ISSN1876-6196

Conference

Conference23rd Conference EUROSENSORS 2009
Abbreviated titleEurosensors XXIII
CountrySwitzerland
CityLausanne
Period6/09/099/09/09

Keywords

  • MEMS
  • Fabry_Perot
  • tunable

Cite this

Blomberg, M., Kattelus, H., & Miranto, A. (2009). Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. In Proceedings of the Eurosensors XXIII conference (pp. 552-555). Elsevier. Procedia Chemistry, No. 1, Vol.. 1 https://doi.org/10.1016/j.proche.2009.07.138
Blomberg, Martti ; Kattelus, Hannu ; Miranto, Akseli. / Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. Proceedings of the Eurosensors XXIII conference. Elsevier, 2009. pp. 552-555 (Procedia Chemistry; No. 1, Vol. 1).
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title = "Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light",
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language = "English",
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Blomberg, M, Kattelus, H & Miranto, A 2009, Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. in Proceedings of the Eurosensors XXIII conference. Elsevier, Procedia Chemistry, no. 1, vol. 1, pp. 552-555, 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland, 6/09/09. https://doi.org/10.1016/j.proche.2009.07.138

Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. / Blomberg, Martti; Kattelus, Hannu; Miranto, Akseli.

Proceedings of the Eurosensors XXIII conference. Elsevier, 2009. p. 552-555 (Procedia Chemistry; No. 1, Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

AU - Blomberg, Martti

AU - Kattelus, Hannu

AU - Miranto, Akseli

PY - 2009

Y1 - 2009

KW - MEMS

KW - Fabry_Perot

KW - tunable

U2 - 10.1016/j.proche.2009.07.138

DO - 10.1016/j.proche.2009.07.138

M3 - Conference article in proceedings

T3 - Procedia Chemistry

SP - 552

EP - 555

BT - Proceedings of the Eurosensors XXIII conference

PB - Elsevier

ER -

Blomberg M, Kattelus H, Miranto A. Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. In Proceedings of the Eurosensors XXIII conference. Elsevier. 2009. p. 552-555. (Procedia Chemistry; No. 1, Vol. 1). https://doi.org/10.1016/j.proche.2009.07.138