Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

Martti Blomberg, Hannu Kattelus, Akseli Miranto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the Eurosensors XXIII conference
    PublisherElsevier
    Pages552-555
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
    Duration: 6 Sep 20099 Sep 2009

    Publication series

    SeriesProcedia Chemistry
    Number1
    Volume1
    ISSN1876-6196

    Conference

    Conference23rd Conference EUROSENSORS 2009
    Abbreviated titleEurosensors XXIII
    CountrySwitzerland
    CityLausanne
    Period6/09/099/09/09

    Keywords

    • MEMS
    • Fabry_Perot
    • tunable

    Cite this

    Blomberg, M., Kattelus, H., & Miranto, A. (2009). Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. In Proceedings of the Eurosensors XXIII conference (pp. 552-555). Elsevier. Procedia Chemistry, No. 1, Vol.. 1 https://doi.org/10.1016/j.proche.2009.07.138
    Blomberg, Martti ; Kattelus, Hannu ; Miranto, Akseli. / Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. Proceedings of the Eurosensors XXIII conference. Elsevier, 2009. pp. 552-555 (Procedia Chemistry; No. 1, Vol. 1).
    @inproceedings{93e17f701abc4e9f95924f2dfd055b55,
    title = "Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light",
    keywords = "MEMS, Fabry_Perot, tunable",
    author = "Martti Blomberg and Hannu Kattelus and Akseli Miranto",
    year = "2009",
    doi = "10.1016/j.proche.2009.07.138",
    language = "English",
    series = "Procedia Chemistry",
    number = "1",
    pages = "552--555",
    booktitle = "Proceedings of the Eurosensors XXIII conference",
    publisher = "Elsevier",
    address = "Netherlands",

    }

    Blomberg, M, Kattelus, H & Miranto, A 2009, Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. in Proceedings of the Eurosensors XXIII conference. Elsevier, Procedia Chemistry, no. 1, vol. 1, pp. 552-555, 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland, 6/09/09. https://doi.org/10.1016/j.proche.2009.07.138

    Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. / Blomberg, Martti; Kattelus, Hannu; Miranto, Akseli.

    Proceedings of the Eurosensors XXIII conference. Elsevier, 2009. p. 552-555 (Procedia Chemistry; No. 1, Vol. 1).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

    AU - Blomberg, Martti

    AU - Kattelus, Hannu

    AU - Miranto, Akseli

    PY - 2009

    Y1 - 2009

    KW - MEMS

    KW - Fabry_Perot

    KW - tunable

    U2 - 10.1016/j.proche.2009.07.138

    DO - 10.1016/j.proche.2009.07.138

    M3 - Conference article in proceedings

    T3 - Procedia Chemistry

    SP - 552

    EP - 555

    BT - Proceedings of the Eurosensors XXIII conference

    PB - Elsevier

    ER -

    Blomberg M, Kattelus H, Miranto A. Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light. In Proceedings of the Eurosensors XXIII conference. Elsevier. 2009. p. 552-555. (Procedia Chemistry; No. 1, Vol. 1). https://doi.org/10.1016/j.proche.2009.07.138