@inproceedings{93e17f701abc4e9f95924f2dfd055b55,
title = "Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light",
keywords = "MEMS, Fabry_Perot, tunable",
author = "Martti Blomberg and Hannu Kattelus and Akseli Miranto",
year = "2009",
doi = "10.1016/j.proche.2009.07.138",
language = "English",
series = "Procedia Chemistry",
publisher = "Elsevier",
number = "1",
pages = "552--555",
booktitle = "Proceedings of the Eurosensors XXIII conference",
address = "Netherlands",
note = "23rd Conference EUROSENSORS 2009, Eurosensors XXIII ; Conference date: 06-09-2009 Through 09-09-2009",
}