Electrically Tunable Surface Micromachined Fabry-Perot interferometer for Visible Light

Martti Blomberg, Hannu Kattelus, Akseli Miranto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    6 Citations (Scopus)
    Original languageEnglish
    Title of host publicationProceedings of the Eurosensors XXIII conference
    PublisherElsevier
    Pages552-555
    DOIs
    Publication statusPublished - 2009
    MoE publication typeA4 Article in a conference publication
    Event23rd Conference EUROSENSORS 2009 - Lausanne, Switzerland
    Duration: 6 Sep 20099 Sep 2009

    Publication series

    SeriesProcedia Chemistry
    Number1
    Volume1
    ISSN1876-6196

    Conference

    Conference23rd Conference EUROSENSORS 2009
    Abbreviated titleEurosensors XXIII
    Country/TerritorySwitzerland
    CityLausanne
    Period6/09/099/09/09

    Keywords

    • MEMS
    • Fabry_Perot
    • tunable

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