Electrically tuneable micromachined fabry-perot interferometer in gas analysis

Martti Blomberg, Altti Torkkeli, Ari Lehto, Christer Helenelund, Mauri Viitasalo

Research output: Contribution to journalArticleScientificpeer-review

31 Citations (Scopus)

Abstract

This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration.

Properties of the FPI are discussed, as well as the performance of the measurement system.

Original languageEnglish
Pages (from-to)119 - 121
Number of pages3
JournalPhysica Scripta
VolumeT69
DOIs
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

Fingerprint

Fabry-Perot Interferometer
gas analysis
Fabry-Perot interferometers
Absorption
Measurement System
gases
absorption spectra
electromagnetic absorption
chambers
Detector
Wavelength
Gas
detectors
wavelengths

Cite this

Blomberg, Martti ; Torkkeli, Altti ; Lehto, Ari ; Helenelund, Christer ; Viitasalo, Mauri. / Electrically tuneable micromachined fabry-perot interferometer in gas analysis. In: Physica Scripta. 1997 ; Vol. T69. pp. 119 - 121.
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Electrically tuneable micromachined fabry-perot interferometer in gas analysis. / Blomberg, Martti; Torkkeli, Altti; Lehto, Ari; Helenelund, Christer; Viitasalo, Mauri.

In: Physica Scripta, Vol. T69, 1997, p. 119 - 121.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Blomberg, Martti

AU - Torkkeli, Altti

AU - Lehto, Ari

AU - Helenelund, Christer

AU - Viitasalo, Mauri

PY - 1997

Y1 - 1997

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U2 - 10.1088/0031-8949/1997/T69/018

DO - 10.1088/0031-8949/1997/T69/018

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