Electrically tuneable micromachined fabry-perot interferometer in gas analysis

Martti Blomberg; Altti Torkkeli; Ari Lehto; Christer Helenelund; Mauri Viitasalo

doi:10.1088/0031-8949/1997/T69/018

Electrically tuneable micromachined fabry-perot interferometer in gas analysis

Martti Blomberg, Altti Torkkeli, Ari Lehto, Christer Helenelund, Mauri Viitasalo

Vaisala Oyj

Research output: Contribution to journal › Article › Scientific › peer-review

42 Citations (Scopus)

Abstract

This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration.

Properties of the FPI are discussed, as well as the performance of the measurement system.

Original language	English
Pages (from-to)	119 - 121
Number of pages	3
Journal	Physica Scripta
Volume	T69
DOIs	https://doi.org/10.1088/0031-8949/1997/T69/018
Publication status	Published - 1997
MoE publication type	A1 Journal article-refereed

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10.1088/0031-8949/1997/T69/018

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title = "Electrically tuneable micromachined fabry-perot interferometer in gas analysis",

abstract = "This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system. ",

author = "Martti Blomberg and Altti Torkkeli and Ari Lehto and Christer Helenelund and Mauri Viitasalo",

year = "1997",

doi = "10.1088/0031-8949/1997/T69/018",

language = "English",

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pages = "119 -- 121",

journal = "Physica Scripta",

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T1 - Electrically tuneable micromachined fabry-perot interferometer in gas analysis

AU - Blomberg, Martti

AU - Torkkeli, Altti

AU - Lehto, Ari

AU - Helenelund, Christer

AU - Viitasalo, Mauri

PY - 1997

Y1 - 1997

N2 - This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system.

AB - This paper describes an optical gas concentration measurement system, which is based on an electrically tuneable micromachined Fabry-Perot interferometer (FPI). The operating principle of the system is NDIR Single-Beam Dual-Wavelength measurement. The FPI is tuned so that the pass band coincides with the absorption band of the measured gas; a detector records the strength of the signal getting through the measurement chamber. The pass band of the FPI is then shifted to either side of the absorption band; the detected signal constitutes the reference signal. The ratio of these two signals indicates the degree of light absorption and so the gas concentration. Properties of the FPI are discussed, as well as the performance of the measurement system.

U2 - 10.1088/0031-8949/1997/T69/018

DO - 10.1088/0031-8949/1997/T69/018

M3 - Article

SN - 0281-1847

VL - T69

SP - 119

EP - 121

JO - Physica Scripta

JF - Physica Scripta

ER -

Electrically tuneable micromachined fabry-perot interferometer in gas analysis

Abstract

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