Electrically tunable NIR spectrometer

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

5 Citations (Scopus)

Abstract

The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

Original languageEnglish
Title of host publicationMicro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
EditorsOliver M. Parriaux, Ernst-Bernhard Kley, Brian Culshaw, Magnus Breidne
PublisherInternational Society for Optics and Photonics SPIE
Pages181-184
ISBN (Print)0819425192
DOIs
Publication statusPublished - 1997
MoE publication typeA4 Article in a conference publication
EventMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications - Munich, Germany
Duration: 16 Jun 199716 Jun 1997

Publication series

SeriesProceedings of SPIE
Volume3099
ISSN0277-786X

Conference

ConferenceMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications
CountryGermany
CityMunich
Period16/06/9716/06/97

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  • Cite this

    Keränen, K., Karioja, P., Rusanen, O., Tenhunen, J., Blomberg, M., & Lehto, A. (1997). Electrically tunable NIR spectrometer. In O. M. Parriaux, E-B. Kley, B. Culshaw, & M. Breidne (Eds.), Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications (pp. 181-184). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 3099 https://doi.org/10.1117/12.281225