Electrically tunable NIR spectrometer

Kimmo Keränen, Pentti Karioja, Outi Rusanen, Jussi Tenhunen, Martti Blomberg, Ari Lehto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    5 Citations (Scopus)

    Abstract

    The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.

    Original languageEnglish
    Title of host publicationMicro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications
    EditorsOliver M. Parriaux, Ernst-Bernhard Kley, Brian Culshaw, Magnus Breidne
    PublisherInternational Society for Optics and Photonics SPIE
    Pages181-184
    ISBN (Print)0819425192
    DOIs
    Publication statusPublished - 1997
    MoE publication typeA4 Article in a conference publication
    EventMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications - Munich, Germany
    Duration: 16 Jun 199716 Jun 1997

    Publication series

    SeriesProceedings of SPIE
    Volume3099
    ISSN0277-786X

    Conference

    ConferenceMicro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications
    Country/TerritoryGermany
    CityMunich
    Period16/06/9716/06/97

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