@inproceedings{faf061c0e6264dcca24d649b42d1ba4f,
title = "Electrically tunable NIR spectrometer",
abstract = "The packaging of a miniaturized NIR-spectrometer is demonstrated. The heart of this NIR-spectrometer is an electrically tunable silicon surface micromachined Fabry- Perot interferometer (FPI). For reliable operation, the FPI device has to be mounted so that thermo-mechanical stresses are not present in its active area. This can be realized basically by mounting FPI on a substrate that has a thermal expansion coefficient close to silicon, using elastic material for mounting or minimizing the joint area between FPI and substrate. The FPI provides the possibility for the manufacturing of a miniaturized single-axis NIR-spectrometer for large-volume applications.",
author = "Kimmo Ker{\"a}nen and Pentti Karioja and Outi Rusanen and Jussi Tenhunen and Martti Blomberg and Ari Lehto",
year = "1997",
doi = "10.1117/12.281225",
language = "English",
isbn = "0819425192",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
pages = "181--184",
editor = "Parriaux, {Oliver M.} and Ernst-Bernhard Kley and Brian Culshaw and Magnus Breidne",
booktitle = "Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications",
address = "United States",
note = "Micro-optical Technologies for Measurement, Sensors and Microsystems II and Optical Fiber Sensor Technologies and Applications ; Conference date: 16-06-1997 Through 16-06-1997",
}