Electro-optical properties of BaTiO3-SrTiO3 multilayer thin films for waveguide modulators

Jussi Hiltunen, Mikko Karppinen, Pentti Karioja, J. Lappalainen, J. Puustinen, V. Lantto, Harry L. Tuller

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)


Optical properties of ferroelectric BaTiO3 (BTO) and paraelectric SrTiO3 (STO) multilayer structures were investigated as a possible material choice for thin-film electro-optic devices. It has been demonstrated that dielectric properties can be enhanced by optimizing the stacking periodicity of BTO-STO superlattices, and in this work, it was studied how the shifts in permittivity are transferred to the optical properties. BTO-STO superlattices with stacking periodicity varying between 27 Å and 1670 Å were grown on MgO substrates by pulsed laser deposition. In X-ray diffraction patterns, periodic satellite peaks were observed indicating the formation artificial superlattices. The evolution of electro-optic response with varying stacking periodicity was analyzed by ellipsometric transmission method. The electro-optic response reached a maximum at a stacking periodicity of 105 Å corresponding the individual layer thickness of 13 unit cells. The suitability of superlattices, and also single layer BTO thin films, in planar optical devices were evaluated by fabricating and characterizing Mach-Zehnder waveguide modulators. (23 refs.)
Original languageEnglish
Title of host publicationSilicon Photonics and Photonic Integrated Circuits
PublisherInternational Society for Optics and Photonics SPIE
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe 2008: Silicon Photonics and Photonic Integrated Circuits - Strasbourg, France
Duration: 7 Apr 200810 Apr 2008

Publication series

SeriesProceedings of SPIE


ConferenceSPIE Photonics Europe 2008

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