Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

Pentti Mattila, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)

Abstract

Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems
Original languageEnglish
Pages (from-to)1-7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume42
Issue number1
DOIs
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

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electroacoustics
Ultrasonic transducers
Electrostatics
Transducers
transducers
ultrasonics
electrostatics
Equivalent circuits
Ultrasonics
Robots
Sensors
robots
equivalent circuits
prototypes
sensors
simulation

Cite this

Mattila, Pentti ; Tsuzuki, Fabio ; Väätäjä, Heli ; Sasaki, Ken. / Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates. In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control. 1995 ; Vol. 42, No. 1. pp. 1-7.
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Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates. / Mattila, Pentti; Tsuzuki, Fabio; Väätäjä, Heli; Sasaki, Ken.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 42, No. 1, 1995, p. 1-7.

Research output: Contribution to journalArticleScientificpeer-review

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AU - Tsuzuki, Fabio

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DO - 10.1109/58.368320

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