Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

Pentti Mattila; Fabio Tsuzuki; Heli Väätäjä; Ken Sasaki

doi:10.1109/58.368320

Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

Pentti Mattila, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

28 Citations (Scopus)

Abstract

Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems

Original language	English
Pages (from-to)	1-7
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	42
Issue number	1
DOIs	https://doi.org/10.1109/58.368320
Publication status	Published - 1995
MoE publication type	A1 Journal article-refereed

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title = "Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates",

abstract = "Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems",

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AU - Väätäjä, Heli

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AB - Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

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