Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

Pentti Mattila, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki

Research output: Contribution to journalArticleScientificpeer-review

28 Citations (Scopus)


Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems
Original languageEnglish
Pages (from-to)1-7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Issue number1
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed


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