Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates

Pentti Mattila, Fabio Tsuzuki, Heli Väätäjä, Ken Sasaki

Research output: Contribution to journalArticleScientificpeer-review

25 Citations (Scopus)

Abstract

Capacitive ultrasonic transducers are widely used to generate airborne ultrasound. This paper presents an equivalent circuit for an electrostatic transducer with a V-grooved backplate. The comparison between simulation results and measurements on a prototype transducer shows that the model gives reliable results. This model is useful in many applications, for example to simulate sensors in a robot and to design ultrasonic transducer systems
Original languageEnglish
Pages (from-to)1-7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume42
Issue number1
DOIs
Publication statusPublished - 1995
MoE publication typeA1 Journal article-refereed

Fingerprint Dive into the research topics of 'Electroacoustic model for electrostatic ultrasonic transducers with V-grooved backplates'. Together they form a unique fingerprint.

Cite this