Electromechanical analysis of micromechanical SOI-fabricated RF resonators

Tuomas Lamminmäki, Kaius Ruokonen, Ilkka Tittonen, Tomi Mattila, Olli Jaakkola, Aarne Oja, Heikki Seppä, Pekka Seppälä, Jyrki Kiihamäki

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)
    Original languageEnglish
    Title of host publication3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000
    Subtitle of host publicationSan Diego, CA, US, 27-29 March 2000
    Place of PublicationCambridge MA, US
    PublisherComputational Publications
    Pages217-220
    ISBN (Print)0-96661357-0
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

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