Original language | English |
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Title of host publication | 3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000 |
Subtitle of host publication | San Diego, CA, US, 27-29 March 2000 |
Place of Publication | Cambridge MA, US |
Publisher | Computational Publications |
Pages | 217-220 |
ISBN (Print) | 0-96661357-0 |
Publication status | Published - 2000 |
MoE publication type | A4 Article in a conference publication |
Electromechanical analysis of micromechanical SOI-fabricated RF resonators
Tuomas Lamminmäki, Kaius Ruokonen, Ilkka Tittonen, Tomi Mattila, Olli Jaakkola, Aarne Oja, Heikki Seppä, Pekka Seppälä, Jyrki Kiihamäki
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
7
Citations
(Scopus)