Electromechanical analysis of micromechanical SOI-fabricated RF resonators

Tuomas Lamminmäki, Kaius Ruokonen, Ilkka Tittonen, Tomi Mattila, Olli Jaakkola, Aarne Oja, Heikki Seppä, Pekka Seppälä, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Title of host publication3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000
Subtitle of host publicationSan Diego, CA, US, 27-29 March 2000
Place of PublicationCambridge MA, US
PublisherComputational Publications
Pages217-220
ISBN (Print)0-96661357-0
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication

Cite this

Lamminmäki, T., Ruokonen, K., Tittonen, I., Mattila, T., Jaakkola, O., Oja, A., Seppä, H., Seppälä, P., & Kiihamäki, J. (2000). Electromechanical analysis of micromechanical SOI-fabricated RF resonators. In 3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000: San Diego, CA, US, 27-29 March 2000 (pp. 217-220). Computational Publications.