Electromechanical analysis of micromechanical SOI-fabricated RF resonators

Tuomas Lamminmäki; Kaius Ruokonen; Ilkka Tittonen; Tomi Mattila; Olli Jaakkola; Aarne Oja; Heikki Seppä; Pekka Seppälä; Jyrki Kiihamäki

Electromechanical analysis of micromechanical SOI-fabricated RF resonators

Tuomas Lamminmäki
, Kaius Ruokonen
, Ilkka Tittonen
, Tomi Mattila
, Olli Jaakkola
, Aarne Oja
, Heikki Seppä
, Pekka Seppälä
, Jyrki Kiihamäki

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

7 Citations (Scopus)

Original language	English
Title of host publication	3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000
Subtitle of host publication	San Diego, CA, US, 27-29 March 2000
Place of Publication	Cambridge MA, US
Publisher	Computational Publications
Pages	217-220
ISBN (Print)	0-96661357-0
Publication status	Published - 2000
MoE publication type	A4 Article in a conference publication

Cite this

Lamminmäki, T., Ruokonen, K., Tittonen, I., Mattila, T., Jaakkola, O., Oja, A., Seppä, H., Seppälä, P., & Kiihamäki, J. (2000). Electromechanical analysis of micromechanical SOI-fabricated RF resonators. In 3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000: San Diego, CA, US, 27-29 March 2000 (pp. 217-220). Computational Publications.

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title = "Electromechanical analysis of micromechanical SOI-fabricated RF resonators",

author = "Tuomas Lamminm{\"a}ki and Kaius Ruokonen and Ilkka Tittonen and Tomi Mattila and Olli Jaakkola and Aarne Oja and Heikki Sepp{\"a} and Pekka Sepp{\"a}l{\"a} and Jyrki Kiiham{\"a}ki",

note = "An Interdisciplinary Integrative Forum on Modeling, Simulation and Scientific Computing in the Microelectronic, Semiconductor, Sensors, Materials and Biotechnology fields",

year = "2000",

language = "English",

isbn = "0-96661357-0",

pages = "217--220",

booktitle = "3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000",

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Lamminmäki, T, Ruokonen, K, Tittonen, I, Mattila, T, Jaakkola, O, Oja, A, Seppä, H, Seppälä, P & Kiihamäki, J 2000, Electromechanical analysis of micromechanical SOI-fabricated RF resonators. in 3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000: San Diego, CA, US, 27-29 March 2000. Computational Publications, Cambridge MA, US, pp. 217-220.

Electromechanical analysis of micromechanical SOI-fabricated RF resonators. / Lamminmäki, Tuomas; Ruokonen, Kaius; Tittonen, Ilkka et al.
3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000: San Diego, CA, US, 27-29 March 2000. Cambridge MA, US: Computational Publications, 2000. p. 217-220.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Electromechanical analysis of micromechanical SOI-fabricated RF resonators

AU - Lamminmäki, Tuomas

AU - Ruokonen, Kaius

AU - Tittonen, Ilkka

AU - Mattila, Tomi

AU - Jaakkola, Olli

AU - Oja, Aarne

AU - Seppä, Heikki

AU - Seppälä, Pekka

AU - Kiihamäki, Jyrki

N1 - An Interdisciplinary Integrative Forum on Modeling, Simulation and Scientific Computing in the Microelectronic, Semiconductor, Sensors, Materials and Biotechnology fields

PY - 2000

Y1 - 2000

M3 - Conference article in proceedings

SN - 0-96661357-0

SP - 217

EP - 220

BT - 3rd International Conference on Modeling and Simulation of Microsystems, MSM 2000

PB - Computational Publications

CY - Cambridge MA, US

ER -