Electromechanical microcomponents for precision applications

Anna-Maija Kärkkäinen; Panu Helistö; Aarne Oja; Heikki Seppä

Electromechanical microcomponents for precision applications

Anna-Maija Kärkkäinen, Panu Helistö, Aarne Oja, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Abstract

A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications.

Original language	English
Title of host publication	URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop
Subtitle of host publication	Digest of technical papers
Place of Publication	Tampere
Publisher	Tampere University of Technology
Pages	41-42
ISBN (Print)	952-15-0686-5
Publication status	Published - 2001
MoE publication type	B3 Non-refereed article in conference proceedings
Event	URSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001 - Tampere, Finland Duration: 23 Oct 2001 → 24 Oct 2001 Conference number: 26

Conference

Conference	URSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001
Country/Territory	Finland
City	Tampere
Period	23/10/01 → 24/10/01

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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https://publications.vtt.fi/julkaisut/muut/2001/emma_ursi_ver2.pdf

Cite this

@inproceedings{a3d7281696d44210bcce7d0441ba1832,

title = "Electromechanical microcomponents for precision applications",

abstract = "A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications.",

author = "Anna-Maija K{\"a}rkk{\"a}inen and Panu Helist{\"o} and Aarne Oja and Heikki Sepp{\"a}",

note = "No ISBN in the original record, so this could also have been published in the FWCW Proceedings volume, 952-15-0731-4; URSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001 ; Conference date: 23-10-2001 Through 24-10-2001",

year = "2001",

language = "English",

isbn = "952-15-0686-5",

pages = "41--42",

booktitle = "URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop",

publisher = "Tampere University of Technology",

address = "Finland",

}

Kärkkäinen, A-M, Helistö, P, Oja, A & Seppä, H 2001, Electromechanical microcomponents for precision applications. in URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop: Digest of technical papers. Tampere University of Technology, Tampere, pp. 41-42, URSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001, Tampere, Finland, 23/10/01. <https://publications.vtt.fi/julkaisut/muut/2001/emma_ursi_ver2.pdf>

Electromechanical microcomponents for precision applications. / Kärkkäinen, Anna-Maija; Helistö, Panu; Oja, Aarne et al.
URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop: Digest of technical papers. Tampere: Tampere University of Technology, 2001. p. 41-42.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Electromechanical microcomponents for precision applications

AU - Kärkkäinen, Anna-Maija

AU - Helistö, Panu

AU - Oja, Aarne

AU - Seppä, Heikki

N1 - Conference code: 26

PY - 2001

Y1 - 2001

N2 - A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications.

AB - A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications.

M3 - Conference article in proceedings

SN - 952-15-0686-5

SP - 41

EP - 42

BT - URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop

PB - Tampere University of Technology

CY - Tampere

T2 - URSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001

Y2 - 23 October 2001 through 24 October 2001

ER -

Electromechanical microcomponents for precision applications

Abstract

Conference

UN SDGs

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