Electromechanical microcomponents for precision applications

Anna-Maija Kärkkäinen, Panu Helistö, Aarne Oja, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    Abstract

    A new EC funded project EMMA, ElectroMechanical Microcomponents for Precision Applications, has started recently. The aim of the project is to develop micromecanical capacitive transducers suitable for electricity metrology. An ac and a dc voltage reference, an AC/DC converter, and a low frequency voltage divider have been demonstrated already and will be elaborated further in the project. A promising new field is to study MEMS transducers in high frequency applications.
    Original languageEnglish
    Title of host publicationURSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop
    Subtitle of host publicationDigest of technical papers
    Place of PublicationTampere
    PublisherTampere University of Technology
    Pages41-42
    ISBN (Print)952-15-0686-5
    Publication statusPublished - 2001
    MoE publication typeB3 Non-refereed article in conference proceedings
    EventURSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001 - Tampere, Finland
    Duration: 23 Oct 200124 Oct 2001
    Conference number: 26

    Conference

    ConferenceURSI XXVI Convention on Radio Science and 2nd Finnish Wireless Communications Workshop, FWCW 2001
    CountryFinland
    CityTampere
    Period23/10/0124/10/01

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  • Cite this

    Kärkkäinen, A-M., Helistö, P., Oja, A., & Seppä, H. (2001). Electromechanical microcomponents for precision applications. In URSI XXVI Convention on Radio Science and Second Finnish Wireless Communications Workshop: Digest of technical papers (pp. 41-42). Tampere University of Technology. http://www.vtt.fi/inf/julkaisut/muut/2001/emma_ursi_ver2.pdf