Electromechanical stability of capacitive transducers

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MEMS/MOEMS 2001
    Subtitle of host publicationCannes, France, 25-27 July 2001
    PublisherInternational Society for Optics and Photonics SPIE
    Pages463-468
    DOIs
    Publication statusPublished - 2001
    MoE publication typeB3 Non-refereed article in conference proceedings

    Publication series

    SeriesProceedings of SPIE
    Volume4408
    ISSN0277-786X

    Cite this

    Oja, A., Kyynäräinen, J., & Seppä, H. (2001). Electromechanical stability of capacitive transducers. In Design, Test, Integration and Packaging of MEMS/MOEMS 2001: Cannes, France, 25-27 July 2001 (pp. 463-468). International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 4408 https://doi.org/10.1117/12.425379