Electromechanical stability of capacitive transducers

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationDesign, Test, Integration and Packaging of MEMS/MOEMS 2001
    Subtitle of host publicationCannes, France, 25-27 July 2001
    PublisherInternational Society for Optics and Photonics SPIE
    Pages463-468
    DOIs
    Publication statusPublished - 2001
    MoE publication typeB3 Non-refereed article in conference proceedings

    Publication series

    SeriesProceedings of SPIE
    Volume4408
    ISSN0277-786X

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