Electromigration resistance of multilayer aluminum/titanium interconnects

Manuela Finetti; Hannu Ronkainen; Martti Blomberg; Ilkka Suni

Electromigration resistance of multilayer aluminum/titanium interconnects

Manuela Finetti, Hannu Ronkainen, Martti Blomberg, Ilkka Suni

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

Original language	English
Title of host publication	Thin films
Subtitle of host publication	interfaces and phenomena
Editors	R.J. Nemanich, P.S. Ho, S.S. Lau
Place of Publication	Cambridge
Publisher	Cambridge University Press
Pages	811-816
ISBN (Print)	978-1-1074-0574-5
Publication status	Published - 1986
MoE publication type	D2 Article in professional manuals or guides or professional information systems or text book material

Publication series

Series	Materials Research Society Symposia Proceedings
Volume	54
ISSN	0272-9172

Cite this

@inbook{46759b15144c4c1ebec5a411a620a0df,

title = "Electromigration resistance of multilayer aluminum/titanium interconnects",

author = "Manuela Finetti and Hannu Ronkainen and Martti Blomberg and Ilkka Suni",

note = "LIS: A3 CA: PUO",

year = "1986",

language = "English",

isbn = "978-1-1074-0574-5",

series = "Materials Research Society Symposia Proceedings",

publisher = "Cambridge University Press",

pages = "811--816",

editor = "R.J. Nemanich and P.S. Ho and S.S. Lau",

booktitle = "Thin films",

address = "United Kingdom",

}

Electromigration resistance of multilayer aluminum/titanium interconnects. / Finetti, Manuela; Ronkainen, Hannu; Blomberg, Martti et al.
Thin films: interfaces and phenomena. ed. / R.J. Nemanich; P.S. Ho; S.S. Lau. Cambridge: Cambridge University Press, 1986. p. 811-816 (Materials Research Society Symposia Proceedings, Vol. 54).

Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Professional

TY - CHAP

T1 - Electromigration resistance of multilayer aluminum/titanium interconnects

AU - Finetti, Manuela

AU - Ronkainen, Hannu

AU - Blomberg, Martti

AU - Suni, Ilkka

N1 - LIS: A3 CA: PUO

PY - 1986

Y1 - 1986

M3 - Chapter or book article

SN - 978-1-1074-0574-5

T3 - Materials Research Society Symposia Proceedings

SP - 811

EP - 816

BT - Thin films

A2 - Nemanich, R.J.

A2 - Ho, P.S.

A2 - Lau, S.S.

PB - Cambridge University Press

CY - Cambridge

ER -