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Electron Probe Microanalysis of HfO2 Thin Films on Conductive and Insulating Substrates
Marina Lulla, Jelena Asari, Jaan Aarik, Kaupo Kukli, Raul Rammula, Unto Tapper, Esko I. Kauppinen, Väinö Sammelselg (Corresponding Author)
Research output: Contribution to journal › Article › Scientific › peer-review
4
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(Scopus)