Electron Probe Microanalysis of HfO2 Thin Films on Conductive and Insulating Substrates
- Marina Lulla
- , Jelena Asari
- , Jaan Aarik
- , Kaupo Kukli
- , Raul Rammula
- , Unto Tapper
- , Esko I. Kauppinen
- , Väinö Sammelselg*
*Corresponding author for this work
- University of Tartu
- VTT (former employee or external)
Research output: Contribution to journal › Article › Scientific › peer-review
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