Abstract
We demonstrate electronic cooling of a suspended AuPd island using superconductor-insulator-normal metal tunnel junctions. This was achieved by developing a simple fabrication method for reliably releasing narrow submicron-sized metal beams. The process is based on reactive ion etching
and uses a conducting substrate to avoid charge-up damage and is
compatible with, e.g., conventional e-beam lithography, shadow-angle metal deposition, and oxide tunnel junctions. The devices function well and exhibit clear cooling, up to a factor of 2 at sub-Kelvin temperatures.
Original language | English |
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Article number | 073101 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 94 |
Issue number | 7 |
DOIs | |
Publication status | Published - 2009 |
MoE publication type | A1 Journal article-refereed |
Keywords
- electronic cooling
- gold
- palladium
- superconductor-insulator
- superconducting junction devices