Electrostatic MEMS tunable split-ring resonators for THz filter applications

Zhengli Han, Kenta Kohno, Tomi Haatainen, Tapio Mäkelä, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    4 Citations (Scopus)

    Abstract

    We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.
    Original languageEnglish
    Title of host publication2013 International Conference on Optical MEMS and Nanophotonics (OMN)
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages165-166
    ISBN (Electronic)978-1-4799-1156-1
    ISBN (Print)978-1-4799-1512-5
    DOIs
    Publication statusPublished - 2013
    MoE publication typeA4 Article in a conference publication
    EventInternational Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan
    Duration: 18 Aug 201322 Aug 2013

    Conference

    ConferenceInternational Conference on Optical MEMS and Nanophotonics 2013
    Country/TerritoryJapan
    CityKanazawa
    Period18/08/1322/08/13

    Keywords

    • MEMS
    • THZ filter

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