Abstract
We propose a new use of an RF-MEMS (radio frequency -
micro electro mechanical systems) capacitive switch to
construct a tunable terahertz filter. The built-in
capacitor within a split-ring resonator is
electrostatically actuated to shift the resonant
frequency, providing a behavior as an ON/OFF switch for a
particular frequency in the terahertz band. The device is
compatible with the surface micromachining process of
metals as well as with the roll-to-roll printing
patterning for large and flexible sheet filters.
Original language | English |
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Title of host publication | 2013 International Conference on Optical MEMS and Nanophotonics (OMN) |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 165-166 |
ISBN (Electronic) | 978-1-4799-1156-1 |
ISBN (Print) | 978-1-4799-1512-5 |
DOIs | |
Publication status | Published - 2013 |
MoE publication type | A4 Article in a conference publication |
Event | International Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013 |
Conference
Conference | International Conference on Optical MEMS and Nanophotonics 2013 |
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Country/Territory | Japan |
City | Kanazawa |
Period | 18/08/13 → 22/08/13 |
Keywords
- MEMS
- THZ filter