Electrostatic MEMS tunable split-ring resonators for THz filter applications

Zhengli Han; Kenta Kohno; Tomi Haatainen; Tapio Mäkelä; Hiroyuki Fujita; Kazuhiko Hirakawa; Hiroshi Toshiyoshi

doi:10.1109/OMN.2013.6659111

Electrostatic MEMS tunable split-ring resonators for THz filter applications

Zhengli Han, Kenta Kohno, Tomi Haatainen, Tapio Mäkelä, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi

University of Tokyo

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

5 Citations (Scopus)

Abstract

We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

Original language	English
Title of host publication	2013 International Conference on Optical MEMS and Nanophotonics (OMN)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	165-166
ISBN (Electronic)	978-1-4799-1156-1
ISBN (Print)	978-1-4799-1512-5
DOIs	https://doi.org/10.1109/OMN.2013.6659111
Publication status	Published - 2013
MoE publication type	A4 Article in a conference publication
Event	International Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan Duration: 18 Aug 2013 → 22 Aug 2013

Conference

Conference	International Conference on Optical MEMS and Nanophotonics 2013
Country/Territory	Japan
City	Kanazawa
Period	18/08/13 → 22/08/13

Keywords

MEMS
THZ filter

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/OMN.2013.6659111

Cite this

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title = "Electrostatic MEMS tunable split-ring resonators for THz filter applications",

abstract = "We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.",

keywords = "MEMS, THZ filter",

author = "Zhengli Han and Kenta Kohno and Tomi Haatainen and Tapio M{\"a}kel{\"a} and Hiroyuki Fujita and Kazuhiko Hirakawa and Hiroshi Toshiyoshi",

year = "2013",

doi = "10.1109/OMN.2013.6659111",

language = "English",

isbn = "978-1-4799-1512-5",

pages = "165--166",

booktitle = "2013 International Conference on Optical MEMS and Nanophotonics (OMN)",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "International Conference on Optical MEMS and Nanophotonics 2013 ; Conference date: 18-08-2013 Through 22-08-2013",

}

Han, Z, Kohno, K, Haatainen, T , Mäkelä, T, Fujita, H, Hirakawa, K & Toshiyoshi, H 2013, Electrostatic MEMS tunable split-ring resonators for THz filter applications. in 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers, pp. 165-166, International Conference on Optical MEMS and Nanophotonics 2013, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659111

Electrostatic MEMS tunable split-ring resonators for THz filter applications. / Han, Zhengli; Kohno, Kenta; Haatainen, Tomi et al.
2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers, 2013. p. 165-166.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Electrostatic MEMS tunable split-ring resonators for THz filter applications

AU - Han, Zhengli

AU - Kohno, Kenta

AU - Haatainen, Tomi

AU - Mäkelä, Tapio

AU - Fujita, Hiroyuki

AU - Hirakawa, Kazuhiko

AU - Toshiyoshi, Hiroshi

PY - 2013

Y1 - 2013

N2 - We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

AB - We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

KW - MEMS

KW - THZ filter

U2 - 10.1109/OMN.2013.6659111

DO - 10.1109/OMN.2013.6659111

M3 - Conference article in proceedings

SN - 978-1-4799-1512-5

SP - 165

EP - 166

BT - 2013 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - International Conference on Optical MEMS and Nanophotonics 2013

Y2 - 18 August 2013 through 22 August 2013

ER -

Electrostatic MEMS tunable split-ring resonators for THz filter applications

Abstract

Conference

Keywords

UN SDGs

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