Electrostatic MEMS tunable split-ring resonators for THz filter applications

Zhengli Han, Kenta Kohno, Tomi Haatainen, Tapio Mäkelä, Hiroyuki Fujita, Kazuhiko Hirakawa, Hiroshi Toshiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

4 Citations (Scopus)

Abstract

We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.
Original languageEnglish
Title of host publication2013 International Conference on Optical MEMS and Nanophotonics (OMN)
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages165-166
ISBN (Electronic)978-1-4799-1156-1
ISBN (Print)978-1-4799-1512-5
DOIs
Publication statusPublished - 2013
MoE publication typeA4 Article in a conference publication
EventInternational Conference on Optical MEMS and Nanophotonics 2013 - Kanazawa, Japan
Duration: 18 Aug 201322 Aug 2013

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics 2013
CountryJapan
CityKanazawa
Period18/08/1322/08/13

Fingerprint

microelectromechanical systems
switches
resonators
electrostatics
filters
tunable filters
rings
micromachining
printing
resonant frequencies
capacitors
radio frequencies
shift
metals

Keywords

  • MEMS
  • THZ filter

Cite this

Han, Z., Kohno, K., Haatainen, T., Mäkelä, T., Fujita, H., Hirakawa, K., & Toshiyoshi, H. (2013). Electrostatic MEMS tunable split-ring resonators for THz filter applications. In 2013 International Conference on Optical MEMS and Nanophotonics (OMN) (pp. 165-166). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/OMN.2013.6659111
Han, Zhengli ; Kohno, Kenta ; Haatainen, Tomi ; Mäkelä, Tapio ; Fujita, Hiroyuki ; Hirakawa, Kazuhiko ; Toshiyoshi, Hiroshi. / Electrostatic MEMS tunable split-ring resonators for THz filter applications. 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers , 2013. pp. 165-166
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abstract = "We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.",
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author = "Zhengli Han and Kenta Kohno and Tomi Haatainen and Tapio M{\"a}kel{\"a} and Hiroyuki Fujita and Kazuhiko Hirakawa and Hiroshi Toshiyoshi",
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Han, Z, Kohno, K, Haatainen, T, Mäkelä, T, Fujita, H, Hirakawa, K & Toshiyoshi, H 2013, Electrostatic MEMS tunable split-ring resonators for THz filter applications. in 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers , pp. 165-166, International Conference on Optical MEMS and Nanophotonics 2013, Kanazawa, Japan, 18/08/13. https://doi.org/10.1109/OMN.2013.6659111

Electrostatic MEMS tunable split-ring resonators for THz filter applications. / Han, Zhengli; Kohno, Kenta; Haatainen, Tomi; Mäkelä, Tapio; Fujita, Hiroyuki; Hirakawa, Kazuhiko; Toshiyoshi, Hiroshi.

2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers , 2013. p. 165-166.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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T1 - Electrostatic MEMS tunable split-ring resonators for THz filter applications

AU - Han, Zhengli

AU - Kohno, Kenta

AU - Haatainen, Tomi

AU - Mäkelä, Tapio

AU - Fujita, Hiroyuki

AU - Hirakawa, Kazuhiko

AU - Toshiyoshi, Hiroshi

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N2 - We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

AB - We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

KW - MEMS

KW - THZ filter

U2 - 10.1109/OMN.2013.6659111

DO - 10.1109/OMN.2013.6659111

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BT - 2013 International Conference on Optical MEMS and Nanophotonics (OMN)

PB - IEEE Institute of Electrical and Electronic Engineers

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Han Z, Kohno K, Haatainen T, Mäkelä T, Fujita H, Hirakawa K et al. Electrostatic MEMS tunable split-ring resonators for THz filter applications. In 2013 International Conference on Optical MEMS and Nanophotonics (OMN). IEEE Institute of Electrical and Electronic Engineers . 2013. p. 165-166 https://doi.org/10.1109/OMN.2013.6659111