Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

V. Kaajakari, A.T. Alastalo, T. Mattila

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)2484-2489
    Number of pages6
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Volume53
    Issue number12
    DOIs
    Publication statusPublished - 2006
    MoE publication typeA1 Journal article-refereed

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