Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

V. Kaajakari, A.T. Alastalo, T. Mattila

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)2484-2489
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number12
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Cite this

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title = "Electrostatic transducers for micromechanical resonators: Free space and solid dielectric",
author = "V. Kaajakari and A.T. Alastalo and T. Mattila",
year = "2006",
doi = "10.1109/TUFFC.2006.197",
language = "English",
volume = "53",
pages = "2484--2489",
journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",
issn = "0885-3010",
publisher = "Institute of Electrical and Electronic Engineers IEEE",
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Electrostatic transducers for micromechanical resonators: Free space and solid dielectric. / Kaajakari, V.; Alastalo, A.T.; Mattila, T.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 53, No. 12, 2006, p. 2484-2489.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

AU - Kaajakari, V.

AU - Alastalo, A.T.

AU - Mattila, T.

PY - 2006

Y1 - 2006

U2 - 10.1109/TUFFC.2006.197

DO - 10.1109/TUFFC.2006.197

M3 - Article

VL - 53

SP - 2484

EP - 2489

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

SN - 0885-3010

IS - 12

ER -