Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	2484-2489
Number of pages	6
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	53
Issue number	12
DOIs	https://doi.org/10.1109/TUFFC.2006.197
Publication status	Published - 2006
MoE publication type	A1 Journal article-refereed

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title = "Electrostatic transducers for micromechanical resonators: Free space and solid dielectric",

author = "V. Kaajakari and A.T. Alastalo and T. Mattila",

year = "2006",

doi = "10.1109/TUFFC.2006.197",

language = "English",

volume = "53",

pages = "2484--2489",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

number = "12",

}

TY - JOUR

T1 - Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

AU - Kaajakari, V.

AU - Alastalo, A.T.

AU - Mattila, T.

PY - 2006

Y1 - 2006

U2 - 10.1109/TUFFC.2006.197

DO - 10.1109/TUFFC.2006.197

M3 - Article

SN - 0885-3010

VL - 53

SP - 2484

EP - 2489

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 12

ER -