Electrostatic transducers for micromechanical resonators: Free space and solid dielectric

V. Kaajakari, A.T. Alastalo, T. Mattila

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)2484-2489
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume53
Issue number12
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

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