Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors

P. Petrik, H. Egger, S. Eiden, E. Agocs, M. Fried, B. Pecz, Kai Kolari, Timo Aalto, R. Horvath, D Giannone

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

3 Citations (Scopus)

Abstract

Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles
Original languageEnglish
Title of host publicationSymposium GG
Subtitle of host publicationTitanium Dioxide Nanomaterials
PublisherMaterials research society
Pages81-87
ISBN (Print)978-1-6051-1329-6
DOIs
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication
Event2011 MRS Spring Meeting - San Francisco, CA, United States
Duration: 25 Apr 201229 Apr 2012

Publication series

SeriesMaterials Research Society Symposia Proceedings
Volume1352
ISSN0272-9172

Conference

Conference2011 MRS Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period25/04/1229/04/12

Fingerprint

nanocomposites
refractivity
sensors
ellipsometry
extinction
optical density
coefficients
wavelengths
depolarization
homogeneity
nanocrystals
surface roughness
light scattering
inclusions
waveguides
optical properties
nanoparticles
preparation
polymers
thin films

Cite this

Petrik, P., Egger, H., Eiden, S., Agocs, E., Fried, M., Pecz, B., ... Giannone, D. (2012). Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors. In Symposium GG: Titanium Dioxide Nanomaterials (pp. 81-87). Materials research society. Materials Research Society Symposia Proceedings, Vol.. 1352 https://doi.org/10.1557/opl.2011.1342
Petrik, P. ; Egger, H. ; Eiden, S. ; Agocs, E. ; Fried, M. ; Pecz, B. ; Kolari, Kai ; Aalto, Timo ; Horvath, R. ; Giannone, D. / Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors. Symposium GG: Titanium Dioxide Nanomaterials. Materials research society, 2012. pp. 81-87 (Materials Research Society Symposia Proceedings, Vol. 1352).
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title = "Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors",
abstract = "Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles",
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Petrik, P, Egger, H, Eiden, S, Agocs, E, Fried, M, Pecz, B, Kolari, K, Aalto, T, Horvath, R & Giannone, D 2012, Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors. in Symposium GG: Titanium Dioxide Nanomaterials. Materials research society, Materials Research Society Symposia Proceedings, vol. 1352, pp. 81-87, 2011 MRS Spring Meeting, San Francisco, CA, United States, 25/04/12. https://doi.org/10.1557/opl.2011.1342

Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors. / Petrik, P.; Egger, H.; Eiden, S.; Agocs, E.; Fried, M.; Pecz, B.; Kolari, Kai; Aalto, Timo; Horvath, R.; Giannone, D.

Symposium GG: Titanium Dioxide Nanomaterials. Materials research society, 2012. p. 81-87 (Materials Research Society Symposia Proceedings, Vol. 1352).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles

AB - Creating optical quality thin films with a high refractive index is increasingly important for waveguide sensor applications. In this study, we present optical models to measure the layer thickness, vertical and lateral homogeneity, the refractive index and the extinction coefficients of the polymer films with nanocrystal inclusions using spectroscopic ellipsometry. The optical properties can be determined in a broad wavelength range from 190 to 1700 nm. The sensitivity of spectroscopic ellipsometry allows a detailed characterization of the nanostructure of the layer, i.e. the surface roughness down to the nm scale, the interface properties, the optical density profile within the layer, and any other optical parameters that can be modeled in a proper and consistent way. In case of larger than about 50 nm particles even the particle size can be determined from the onset of depolarization due to light scattering. Besides the refractive index, the extinction coefficient, being a critical parameter for waveguiding layers, was also determined in a broad wavelength range. Using the above information from the ellipsometric models the preparation conditions can be identified. A range of samples were investigated including doctor bladed films using TiO2 nanoparticles

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Petrik P, Egger H, Eiden S, Agocs E, Fried M, Pecz B et al. Ellipsometric characterization of thin nanocomposite films with tunable refractive index for biochemical sensors. In Symposium GG: Titanium Dioxide Nanomaterials. Materials research society. 2012. p. 81-87. (Materials Research Society Symposia Proceedings, Vol. 1352). https://doi.org/10.1557/opl.2011.1342