Emerging nanopatterning methods

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Abstract

The emerging nanopatterning methods (NaPa) consortium integrates new patterning methods into one project, both anticipating and responding to the increasing need for nanopatterning technologies, standards and metrology required to harness the new application-relevant properties of engineered structures with nm-scale features. To achieve this, research in three technology strands is carried out. The technologies are nanoimprint lithography, soft lithography & self-assembly and MEMS-based nanopatterning.
Original languageEnglish
Title of host publication2007 Digest of papers Microprocesses and Nanotechnology
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages402
Number of pages1
ISBN (Print)4-9902472-4-8
Publication statusPublished - 2007
MoE publication typeNot Eligible
Event20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan
Duration: 5 Nov 20078 Nov 2007

Conference

Conference20th International Microprocesses and Nanotechnology Conference, MNC 2007
CountryJapan
CityKyoto
Period5/11/078/11/07

Fingerprint

Nanoimprint lithography
Self assembly
Lithography
MEMS

Cite this

Ahopelto, J. (2007). Emerging nanopatterning methods. In 2007 Digest of papers Microprocesses and Nanotechnology (pp. 402). IEEE Institute of Electrical and Electronic Engineers .
Ahopelto, Jouni. / Emerging nanopatterning methods. 2007 Digest of papers Microprocesses and Nanotechnology. IEEE Institute of Electrical and Electronic Engineers , 2007. pp. 402
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Ahopelto, J 2007, Emerging nanopatterning methods. in 2007 Digest of papers Microprocesses and Nanotechnology. IEEE Institute of Electrical and Electronic Engineers , pp. 402, 20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 5/11/07.

Emerging nanopatterning methods. / Ahopelto, Jouni.

2007 Digest of papers Microprocesses and Nanotechnology. IEEE Institute of Electrical and Electronic Engineers , 2007. p. 402.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

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Ahopelto J. Emerging nanopatterning methods. In 2007 Digest of papers Microprocesses and Nanotechnology. IEEE Institute of Electrical and Electronic Engineers . 2007. p. 402