Emerging nanopatterning methods, NaPa

    Research output: Contribution to conferenceConference AbstractScientific

    Original languageEnglish
    Publication statusPublished - 2004
    MoE publication typeNot Eligible
    EventUltimate Lithography and Nanodevice Engineering Conference, LITHO2004 - Agelonde, France
    Duration: 13 Jun 200416 Jun 2004

    Conference

    ConferenceUltimate Lithography and Nanodevice Engineering Conference, LITHO2004
    Abbreviated titleLITHO 2004
    CountryFrance
    CityAgelonde
    Period13/06/0416/06/04

    Cite this

    Ahopelto, J. (2004). Emerging nanopatterning methods, NaPa. Abstract from Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, Agelonde, France.
    Ahopelto, Jouni. / Emerging nanopatterning methods, NaPa. Abstract from Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, Agelonde, France.
    @conference{07a6df7c818f44aaa47683a24ef3641b,
    title = "Emerging nanopatterning methods, NaPa",
    author = "Jouni Ahopelto",
    year = "2004",
    language = "English",
    note = "Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, LITHO 2004 ; Conference date: 13-06-2004 Through 16-06-2004",

    }

    Ahopelto, J 2004, 'Emerging nanopatterning methods, NaPa', Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, Agelonde, France, 13/06/04 - 16/06/04.

    Emerging nanopatterning methods, NaPa. / Ahopelto, Jouni.

    2004. Abstract from Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, Agelonde, France.

    Research output: Contribution to conferenceConference AbstractScientific

    TY - CONF

    T1 - Emerging nanopatterning methods, NaPa

    AU - Ahopelto, Jouni

    PY - 2004

    Y1 - 2004

    M3 - Conference Abstract

    ER -

    Ahopelto J. Emerging nanopatterning methods, NaPa. 2004. Abstract from Ultimate Lithography and Nanodevice Engineering Conference, LITHO2004, Agelonde, France.