Emission profile of multi-membrane CMUT for in-air object localization

A. Caspani, N. Errico, F. Giacci, G. Langfelder, A. Longoni, P. J. Koppinen, J. Saarilahti

    Research output: Contribution to journalReview ArticleScientificpeer-review

    1 Citation (Scopus)

    Abstract

    This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

    Original languageEnglish
    Pages (from-to)592-595
    Number of pages4
    JournalProcedia Engineering
    Volume87
    DOIs
    Publication statusPublished - 1 Jan 2014
    MoE publication typeA2 Review article in a scientific journal
    Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
    Duration: 7 Sep 201410 Sep 2014

    Keywords

    • CMUT
    • Emission profile
    • MEMS
    • Object localization
    • Ultrasound transducers

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  • Cite this

    Caspani, A., Errico, N., Giacci, F., Langfelder, G., Longoni, A., Koppinen, P. J., & Saarilahti, J. (2014). Emission profile of multi-membrane CMUT for in-air object localization. Procedia Engineering, 87, 592-595. https://doi.org/10.1016/j.proeng.2014.11.558