Emission profile of multi-membrane CMUT for in-air object localization

A. Caspani; N. Errico; F. Giacci; G. Langfelder; A. Longoni; Panu J. Koppinen; Jaakko Saarilahti

doi:10.1016/j.proeng.2014.11.558

Emission profile of multi-membrane CMUT for in-air object localization

A. Caspani^*, N. Errico, F. Giacci, G. Langfelder, A. Longoni, Panu J. Koppinen, Jaakko Saarilahti

^*Corresponding author for this work

BA6201 RF microsystems

Polytechnic University of Milan

Research output: Contribution to journal › Review Article › peer-review

1 Citation (Scopus)

Abstract

This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

Original language	English
Pages (from-to)	592-595
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.558
Publication status	Published - 1 Jan 2014
MoE publication type	A2 Review article in a scientific journal
Event	28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sept 2014 → 10 Sept 2014

Funding

This material is based upon work supported by Fondazione Cariplo within the S2N project (2010-1351).

Keywords

CMUT
Emission profile
MEMS
Object localization
Ultrasound transducers

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10.1016/j.proeng.2014.11.558Licence: CC BY-NC-ND

Cite this

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title = "Emission profile of multi-membrane CMUT for in-air object localization",

abstract = "This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.",

keywords = "CMUT, Emission profile, MEMS, Object localization, Ultrasound transducers",

author = "A. Caspani and N. Errico and F. Giacci and G. Langfelder and A. Longoni and Koppinen, {Panu J.} and Jaakko Saarilahti",

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language = "English",

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T1 - Emission profile of multi-membrane CMUT for in-air object localization

AU - Caspani, A.

AU - Errico, N.

AU - Giacci, F.

AU - Langfelder, G.

AU - Longoni, A.

AU - Koppinen, Panu J.

AU - Saarilahti, Jaakko

PY - 2014/1/1

Y1 - 2014/1/1

N2 - This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

AB - This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

KW - CMUT

KW - Emission profile

KW - MEMS

KW - Object localization

KW - Ultrasound transducers

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DO - 10.1016/j.proeng.2014.11.558

M3 - Review Article

AN - SCOPUS:84923340661

SN - 1877-7058

VL - 87

SP - 592

EP - 595

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers, EUROSENSORS 2014

Y2 - 7 September 2014 through 10 September 2014

ER -

Emission profile of multi-membrane CMUT for in-air object localization

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