Emission profile of multi-membrane CMUT for in-air object localization

A. Caspani, N. Errico, F. Giacci, G. Langfelder, A. Longoni, P. J. Koppinen, J. Saarilahti

Research output: Contribution to journalReview ArticleScientificpeer-review

1 Citation (Scopus)

Abstract

This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

Original languageEnglish
Pages (from-to)592-595
Number of pages4
JournalProcedia Engineering
Volume87
DOIs
Publication statusPublished - 1 Jan 2014
MoE publication typeA2 Review article in a scientific journal
Event28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy
Duration: 7 Sep 201410 Sep 2014

Fingerprint

Ultrasonic transducers
Membranes
Ultrasonic waves
Air
Full width at half maximum
Ultrasonics
Electrodes
Experiments

Keywords

  • CMUT
  • Emission profile
  • MEMS
  • Object localization
  • Ultrasound transducers

Cite this

Caspani, A., Errico, N., Giacci, F., Langfelder, G., Longoni, A., Koppinen, P. J., & Saarilahti, J. (2014). Emission profile of multi-membrane CMUT for in-air object localization. Procedia Engineering, 87, 592-595. https://doi.org/10.1016/j.proeng.2014.11.558
Caspani, A. ; Errico, N. ; Giacci, F. ; Langfelder, G. ; Longoni, A. ; Koppinen, P. J. ; Saarilahti, J. / Emission profile of multi-membrane CMUT for in-air object localization. In: Procedia Engineering. 2014 ; Vol. 87. pp. 592-595.
@article{ee78bd280cd44aabac2bf3c561b50141,
title = "Emission profile of multi-membrane CMUT for in-air object localization",
abstract = "This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5{\%}.",
keywords = "CMUT, Emission profile, MEMS, Object localization, Ultrasound transducers",
author = "A. Caspani and N. Errico and F. Giacci and G. Langfelder and A. Longoni and Koppinen, {P. J.} and J. Saarilahti",
year = "2014",
month = "1",
day = "1",
doi = "10.1016/j.proeng.2014.11.558",
language = "English",
volume = "87",
pages = "592--595",
journal = "Procedia Engineering",
issn = "1877-7058",
publisher = "Elsevier",

}

Caspani, A, Errico, N, Giacci, F, Langfelder, G, Longoni, A, Koppinen, PJ & Saarilahti, J 2014, 'Emission profile of multi-membrane CMUT for in-air object localization', Procedia Engineering, vol. 87, pp. 592-595. https://doi.org/10.1016/j.proeng.2014.11.558

Emission profile of multi-membrane CMUT for in-air object localization. / Caspani, A.; Errico, N.; Giacci, F.; Langfelder, G.; Longoni, A.; Koppinen, P. J.; Saarilahti, J.

In: Procedia Engineering, Vol. 87, 01.01.2014, p. 592-595.

Research output: Contribution to journalReview ArticleScientificpeer-review

TY - JOUR

T1 - Emission profile of multi-membrane CMUT for in-air object localization

AU - Caspani, A.

AU - Errico, N.

AU - Giacci, F.

AU - Langfelder, G.

AU - Longoni, A.

AU - Koppinen, P. J.

AU - Saarilahti, J.

PY - 2014/1/1

Y1 - 2014/1/1

N2 - This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

AB - This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.

KW - CMUT

KW - Emission profile

KW - MEMS

KW - Object localization

KW - Ultrasound transducers

UR - http://www.scopus.com/inward/record.url?scp=84923340661&partnerID=8YFLogxK

U2 - 10.1016/j.proeng.2014.11.558

DO - 10.1016/j.proeng.2014.11.558

M3 - Review Article

VL - 87

SP - 592

EP - 595

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

ER -

Caspani A, Errico N, Giacci F, Langfelder G, Longoni A, Koppinen PJ et al. Emission profile of multi-membrane CMUT for in-air object localization. Procedia Engineering. 2014 Jan 1;87:592-595. https://doi.org/10.1016/j.proeng.2014.11.558