Abstract
This work presents novel Capacitive Micromachined Ultrasonic Transducers (CMUTs) and their characterization in terms of ultrasound directionality. The devices are formed by 27 membranes, integrated on the same die and connected in parallel, featuring a 1 m gap between the membrane and the bottom electrode, and directly coupling to air at 2.23 MHz. Exploiting the information on the amplitude and delay of the received ultrasonic waves, a directionality profile showing a 14° full width at half maximum (FWHM) and a 0.5-5 cm distance operative range are demonstrated. Object localization experiments show a 2D relative position reconstruction error around 5%.
Original language | English |
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Pages (from-to) | 592-595 |
Number of pages | 4 |
Journal | Procedia Engineering |
Volume | 87 |
DOIs | |
Publication status | Published - 1 Jan 2014 |
MoE publication type | A2 Review article in a scientific journal |
Event | 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sept 2014 → 10 Sept 2014 |
Keywords
- CMUT
- Emission profile
- MEMS
- Object localization
- Ultrasound transducers