Enabling techniques for clean manufacturing of electronics

Matti Lehtimäki

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication37th R3-Nordic Contamination Control Symposium
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages331-338
ISBN (Electronic)951-38-6304-2
ISBN (Print)951-38-6303-4
Publication statusPublished - 2006
MoE publication typeB3 Non-refereed article in conference proceedings
Event37th R3-Nordic Contamination Control Symposium - Tampere, Finland
Duration: 29 May 200631 May 2006

Publication series

SeriesVTT Symposium
Number240
ISSN0357-9387

Conference

Conference37th R3-Nordic Contamination Control Symposium
CountryFinland
CityTampere
Period29/05/0631/05/06

Cite this

Lehtimäki, M. (2006). Enabling techniques for clean manufacturing of electronics. In 37th R3-Nordic Contamination Control Symposium (pp. 331-338). VTT Technical Research Centre of Finland. VTT Symposium, No. 240 http://www.vtt.fi/inf/pdf/symposiums/2006/S240.pdf