Enabling techniques for clean manufacturing of electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	37th R3-Nordic Contamination Control Symposium
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	331-338
ISBN (Electronic)	951-38-6304-2
ISBN (Print)	951-38-6303-4
Publication status	Published - 2006
MoE publication type	B3 Non-refereed article in conference proceedings
Event	37th R3-Nordic Contamination Control Symposium - Tampere, Finland Duration: 29 May 2006 → 31 May 2006

Conference	37th R3-Nordic Contamination Control Symposium
Country/Territory	Finland
City	Tampere
Period	29/05/06 → 31/05/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

@inproceedings{3b55b4d4c03e48abac52765aecc9a50c,

title = "Enabling techniques for clean manufacturing of electronics",

author = "Matti Lehtim{\"a}ki",

year = "2006",

language = "English",

isbn = "951-38-6303-4",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "240",

pages = "331--338",

booktitle = "37th R3-Nordic Contamination Control Symposium",

address = "Finland",

note = "37th R3-Nordic Contamination Control Symposium ; Conference date: 29-05-2006 Through 31-05-2006",

}

TY - GEN

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AU - Lehtimäki, Matti

PY - 2006

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M3 - Conference article in proceedings

SN - 951-38-6303-4

T3 - VTT Symposium

SP - 331

EP - 338

BT - 37th R3-Nordic Contamination Control Symposium

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - 37th R3-Nordic Contamination Control Symposium

Y2 - 29 May 2006 through 31 May 2006

ER -