Enhanced silicon-on-insulator platform enabling new structures and applications

Atte Haapalinna, Timo Aalto

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    3 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'Enhanced silicon-on-insulator platform enabling new structures and applications'. Together they form a unique fingerprint.

    INIS

    Keyphrases

    Engineering

    Material Science