Enhancing the electromechanical coupling in bulk acoustic mode microresonator

Tuomas Lamminmäki, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Aarne Oja, Tomi Mattila, Heikki Seppä, Jyrki Kiihamäki, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationEurosensors XVI Book of Abstracts
PublisherCzech Technical University
Pages383-384
VolumePart 2
ISBN (Print)80-01-02576-4
Publication statusPublished - 2002
MoE publication typeNot Eligible
Event16th European Conference on Solid-State Transducers, Eurosensors XVI - Prague, Czech Republic
Duration: 15 Sep 200218 Sep 2002

Conference

Conference16th European Conference on Solid-State Transducers, Eurosensors XVI
CountryCzech Republic
CityPrague
Period15/09/0218/09/02

Keywords

  • Bulk acoustic mode
  • electromechanical coupling micromechanical resonator

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