Enhancing the electromechanical coupling in bulk acoustic mode microresonator

Tuomas Lamminmäki; Mika Koskenvuori; Pekka Rantakari; Ilkka Tittonen; Aarne Oja; Tomi Mattila; Heikki Seppä; Jyrki Kiihamäki; Hannu Kattelus

Enhancing the electromechanical coupling in bulk acoustic mode microresonator

Tuomas Lamminmäki, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Aarne Oja, Tomi Mattila, Heikki Seppä, Jyrki Kiihamäki, Hannu Kattelus

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Eurosensors XVI Book of Abstracts
Publisher	Czech Technical University
Pages	383-384
Volume	Part 2
ISBN (Print)	80-01-02576-4
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	16th European Conference on Solid-State Transducers, Eurosensors XVI - Prague, Czech Republic Duration: 15 Sept 2002 → 18 Sept 2002

Conference

Conference	16th European Conference on Solid-State Transducers, Eurosensors XVI
Country/Territory	Czech Republic
City	Prague
Period	15/09/02 → 18/09/02

Keywords

Bulk acoustic mode
electromechanical coupling micromechanical resonator

Cite this

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title = "Enhancing the electromechanical coupling in bulk acoustic mode microresonator",

keywords = "Bulk acoustic mode, electromechanical coupling micromechanical resonator",

author = "Tuomas Lamminm{\"a}ki and Mika Koskenvuori and Pekka Rantakari and Ilkka Tittonen and Aarne Oja and Tomi Mattila and Heikki Sepp{\"a} and Jyrki Kiiham{\"a}ki and Hannu Kattelus",

year = "2002",

language = "English",

isbn = "80-01-02576-4",

volume = "Part 2",

pages = "383--384",

booktitle = "Eurosensors XVI Book of Abstracts",

publisher = "Czech Technical University",

address = "Czech Republic",

note = "16th European Conference on Solid-State Transducers, Eurosensors XVI ; Conference date: 15-09-2002 Through 18-09-2002",

}

Lamminmäki, T, Koskenvuori, M, Rantakari, P, Tittonen, I, Oja, A, Mattila, T, Seppä, H, Kiihamäki, J & Kattelus, H 2002, Enhancing the electromechanical coupling in bulk acoustic mode microresonator. in Eurosensors XVI Book of Abstracts. vol. Part 2, Czech Technical University, pp. 383-384, 16th European Conference on Solid-State Transducers, Eurosensors XVI, Prague, Czech Republic, 15/09/02.

TY - CHAP

T1 - Enhancing the electromechanical coupling in bulk acoustic mode microresonator

AU - Lamminmäki, Tuomas

AU - Koskenvuori, Mika

AU - Rantakari, Pekka

AU - Tittonen, Ilkka

AU - Oja, Aarne

AU - Mattila, Tomi

AU - Seppä, Heikki

AU - Kiihamäki, Jyrki

AU - Kattelus, Hannu

PY - 2002

Y1 - 2002

KW - Bulk acoustic mode

KW - electromechanical coupling micromechanical resonator

M3 - Conference abstract in proceedings

SN - 80-01-02576-4

VL - Part 2

SP - 383

EP - 384

BT - Eurosensors XVI Book of Abstracts

PB - Czech Technical University

T2 - 16th European Conference on Solid-State Transducers, Eurosensors XVI

Y2 - 15 September 2002 through 18 September 2002

ER -