Enhancing the electromechanical coupling in bulk acoustic mode microresonator

Tuomas Lamminmäki, Mika Koskenvuori, Pekka Rantakari, Ilkka Tittonen, Aarne Oja, Tomi Mattila, Heikki Seppä, Jyrki Kiihamäki, Hannu Kattelus

    Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

    Original languageEnglish
    Title of host publicationEurosensors XVI Book of Abstracts
    PublisherCzech Technical University
    Pages383-384
    VolumePart 2
    ISBN (Print)80-01-02576-4
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    Event16th European Conference on Solid-State Transducers, Eurosensors XVI - Prague, Czech Republic
    Duration: 15 Sep 200218 Sep 2002

    Conference

    Conference16th European Conference on Solid-State Transducers, Eurosensors XVI
    Country/TerritoryCzech Republic
    CityPrague
    Period15/09/0218/09/02

    Keywords

    • Bulk acoustic mode
    • electromechanical coupling micromechanical resonator

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