Original language | Finnish |
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Pages (from-to) | 22-23 |
Journal | Elektroniikka & Automaatio |
Volume | 37 |
Issue number | 4 |
Publication status | Published - 1984 |
MoE publication type | D1 Article in a trade journal |
Epitaksiprosessilla parempia MOS-piirejä
Markku Ylilammi
Research output: Contribution to journal › Article › Professional