| Original language | Finnish |
|---|---|
| Pages (from-to) | 22-23 |
| Journal | Elektroniikka & Automaatio |
| Volume | 37 |
| Issue number | 4 |
| Publication status | Published - 1984 |
| MoE publication type | D1 Article in a trade journal |
Epitaksiprosessilla parempia MOS-piirejä
Research output: Contribution to journal › Article › Professional