@inbook{cce2d76622a94bdf8dea68df956d9535,
title = "Erbium-doped planar waveguides fabricated with atomic layer deposition",
abstract = "Er-doped waveguides can be used to compensate for the losses encountered by the optical signal around 1550 nm. In this work Er-doped Al2O3 waveguides were realised with the atomic layer deposition (ALD) method. Two microns thick Er-doped aluminium oxide layers were grown with ALD on silica-coated silicon wafers. The ridge-type waveguides were patterned using photolithography and wet etching. The Er-doping was done in situ during the ALD process. Resulted single-mode ridge-type waveguides were measured to obtain optical absorption, emission, fluorescence lifetime, and gain characteristics. Optical excitation of erbium ions was done using 980 nm wavelength.",
keywords = "aluminium oxide, atomic layer deposition, erbium, optical amplification, optical waveguides",
author = "Kimmo Solehmainen and Markku Kapulainen and P{\"a}ivi Heimala",
year = "2003",
language = "English",
isbn = "951-22-6596-6",
series = "Helsinki University of Technology Publications in Engineering Physics A",
publisher = "Teknillinen korkeakoulu",
number = "822",
editor = "Eero Noponen",
booktitle = "Northern Optics 2003",
address = "Finland",
note = "Northern Optics 2003 : Joint Conference of the Optical Societies of Denmark, Finland, Norway and Sweden ; Conference date: 16-06-2003 Through 18-06-2003",
}