Erbium-doped planar waveguides with atomic layer deposition method

Kimmo Solehmainen; Päivi Heimala; Markku Kapulainen; Kirsi Polamo; Runar Törnqvist

doi:10.1117/12.474758

Erbium-doped planar waveguides with atomic layer deposition method

Kimmo Solehmainen, Päivi Heimala, Markku Kapulainen, Kirsi Polamo, Runar Törnqvist

Planar Systems, Inc

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Rare-Earth-Doped Materials and Devices VII
Publisher	International Society for Optics and Photonics SPIE
Pages	121-128
ISBN (Print)	0-8194-4790-0
DOIs	https://doi.org/10.1117/12.474758
Publication status	Published - 2003
MoE publication type	A4 Article in a conference publication
Event	Rare-Earth-Doped Materials and Devices VII: Part of Integrated Optoelectronic Devices symposium, OPTO 2003 - San Jose, United States Duration: 28 Jan 2003 → 30 Jan 2003

Publication series

Series	Proceedings of SPIE
Volume	4990
ISSN	0277-786X

Conference

Conference	Rare-Earth-Doped Materials and Devices VII
Country/Territory	United States
City	San Jose
Period	28/01/03 → 30/01/03

Keywords

aluminium oxide
atomic layer deposition
erbium
optical amplification
optical waveguides

Access to Document

10.1117/12.474758

Cite this

@inproceedings{24ef356ed6574c9588dc0c39e5bfc774,

title = "Erbium-doped planar waveguides with atomic layer deposition method",

keywords = "aluminium oxide, atomic layer deposition, erbium, optical amplification, optical waveguides",

author = "Kimmo Solehmainen and P{\"a}ivi Heimala and Markku Kapulainen and Kirsi Polamo and Runar T{\"o}rnqvist",

year = "2003",

doi = "10.1117/12.474758",

language = "English",

isbn = "0-8194-4790-0",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

pages = "121--128",

booktitle = "Rare-Earth-Doped Materials and Devices VII",

address = "United States",

note = "Rare-Earth-Doped Materials and Devices VII : Part of Integrated Optoelectronic Devices symposium, OPTO 2003 ; Conference date: 28-01-2003 Through 30-01-2003",

}

Solehmainen, K, Heimala, P , Kapulainen, M, Polamo, K & Törnqvist, R 2003, Erbium-doped planar waveguides with atomic layer deposition method. in Rare-Earth-Doped Materials and Devices VII. International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 4990, pp. 121-128, Rare-Earth-Doped Materials and Devices VII, San Jose, California, United States, 28/01/03. https://doi.org/10.1117/12.474758

Erbium-doped planar waveguides with atomic layer deposition method. / Solehmainen, Kimmo; Heimala, Päivi ; Kapulainen, Markku et al.
Rare-Earth-Doped Materials and Devices VII. International Society for Optics and Photonics SPIE, 2003. p. 121-128 (Proceedings of SPIE, Vol. 4990).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Erbium-doped planar waveguides with atomic layer deposition method

AU - Solehmainen, Kimmo

AU - Heimala, Päivi

AU - Kapulainen, Markku

AU - Polamo, Kirsi

AU - Törnqvist, Runar

PY - 2003

Y1 - 2003

KW - aluminium oxide

KW - atomic layer deposition

KW - erbium

KW - optical amplification

KW - optical waveguides

U2 - 10.1117/12.474758

DO - 10.1117/12.474758

M3 - Conference article in proceedings

SN - 0-8194-4790-0

T3 - Proceedings of SPIE

SP - 121

EP - 128

BT - Rare-Earth-Doped Materials and Devices VII

PB - International Society for Optics and Photonics SPIE

T2 - Rare-Earth-Doped Materials and Devices VII

Y2 - 28 January 2003 through 30 January 2003

ER -