Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Tapani Makkonen (Corresponding Author), Tuomas Pensala (Corresponding Author), Juha Vartiainen, Jouni.V. Knuuttila, Jyrki Kaitila, Martti M. Salomaa

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)

    Abstract

    The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.
    Original languageEnglish
    Pages (from-to)42 - 51
    Number of pages10
    JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
    Volume51
    Issue number1
    DOIs
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Fingerprint

    Resonators
    estimating
    resonators
    Acoustic waves
    Thin films
    acoustics
    curves
    thin films
    laminates
    Acoustic bulk wave devices
    Multilayers
    bulk acoustic wave devices
    piezoelectricity
    Piezoelectricity
    Lamb waves
    Surface waves
    Interferometers
    Anisotropy
    Electron microscopes
    interferometers

    Keywords

    • thin films
    • thin film devices
    • thin-film bulk acoustic wave devices
    • BAW
    • BAW resonators

    Cite this

    @article{37c1666c39834239b2bacd3e9fd3512e,
    title = "Estimating materials parameters in thin-film BAW resonators using measured dispersion curves",
    abstract = "The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.",
    keywords = "thin films, thin film devices, thin-film bulk acoustic wave devices, BAW, BAW resonators",
    author = "Tapani Makkonen and Tuomas Pensala and Juha Vartiainen and Jouni.V. Knuuttila and Jyrki Kaitila and Salomaa, {Martti M.}",
    note = "Project code: T2SU00140",
    year = "2004",
    doi = "10.1109/TUFFC.2004.1268466",
    language = "English",
    volume = "51",
    pages = "42 -- 51",
    journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",
    issn = "0885-3010",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    number = "1",

    }

    Estimating materials parameters in thin-film BAW resonators using measured dispersion curves. / Makkonen, Tapani (Corresponding Author); Pensala, Tuomas (Corresponding Author); Vartiainen, Juha; Knuuttila, Jouni.V.; Kaitila, Jyrki; Salomaa, Martti M.

    In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 51, No. 1, 2004, p. 42 - 51.

    Research output: Contribution to journalArticleScientificpeer-review

    TY - JOUR

    T1 - Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

    AU - Makkonen, Tapani

    AU - Pensala, Tuomas

    AU - Vartiainen, Juha

    AU - Knuuttila, Jouni.V.

    AU - Kaitila, Jyrki

    AU - Salomaa, Martti M.

    N1 - Project code: T2SU00140

    PY - 2004

    Y1 - 2004

    N2 - The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.

    AB - The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.

    KW - thin films

    KW - thin film devices

    KW - thin-film bulk acoustic wave devices

    KW - BAW

    KW - BAW resonators

    U2 - 10.1109/TUFFC.2004.1268466

    DO - 10.1109/TUFFC.2004.1268466

    M3 - Article

    VL - 51

    SP - 42

    EP - 51

    JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

    JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

    SN - 0885-3010

    IS - 1

    ER -