Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

Tapani Makkonen (Corresponding Author), Tuomas Pensala (Corresponding Author), Juha Vartiainen, Jouni.V. Knuuttila, Jyrki Kaitila, Martti M. Salomaa

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)

Abstract

The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.
Original languageEnglish
Pages (from-to)42 - 51
Number of pages10
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume51
Issue number1
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Fingerprint

Resonators
estimating
resonators
Acoustic waves
Thin films
acoustics
curves
thin films
laminates
Acoustic bulk wave devices
Multilayers
bulk acoustic wave devices
piezoelectricity
Piezoelectricity
Lamb waves
Surface waves
Interferometers
Anisotropy
Electron microscopes
interferometers

Keywords

  • thin films
  • thin film devices
  • thin-film bulk acoustic wave devices
  • BAW
  • BAW resonators

Cite this

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title = "Estimating materials parameters in thin-film BAW resonators using measured dispersion curves",
abstract = "The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.",
keywords = "thin films, thin film devices, thin-film bulk acoustic wave devices, BAW, BAW resonators",
author = "Tapani Makkonen and Tuomas Pensala and Juha Vartiainen and Jouni.V. Knuuttila and Jyrki Kaitila and Salomaa, {Martti M.}",
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language = "English",
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Estimating materials parameters in thin-film BAW resonators using measured dispersion curves. / Makkonen, Tapani (Corresponding Author); Pensala, Tuomas (Corresponding Author); Vartiainen, Juha; Knuuttila, Jouni.V.; Kaitila, Jyrki; Salomaa, Martti M.

In: IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 51, No. 1, 2004, p. 42 - 51.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Estimating materials parameters in thin-film BAW resonators using measured dispersion curves

AU - Makkonen, Tapani

AU - Pensala, Tuomas

AU - Vartiainen, Juha

AU - Knuuttila, Jouni.V.

AU - Kaitila, Jyrki

AU - Salomaa, Martti M.

N1 - Project code: T2SU00140

PY - 2004

Y1 - 2004

N2 - The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.

AB - The dispersion curves of Lamb-wave modes propagating along a multilayer structure are important for the operation of thin-film bulk acoustic wave (BAW) devices. For instance, the behavior of the side resonances that may contaminate the electrical response of a thin-film BAW resonator depends on the dispersion relation of the layer stack. Because the dispersion behavior depends on the materials parameters (and thicknesses) of the layers in the structure, measurement of the dispersion curves provides a tool for determining the materials parameters of thin films. We have determined the dispersion curves for a multilayer structure through measuring the mechanical displacement profiles over the top electrode of a thin-film BAW resonator at several frequencies using a homodyne Michelson laser interferometer. The layer thicknesses are obtained using scanning electron microscope (SEM) measurements. In the numerical computation of the dispersion curves, the piezoelectricity and full anisotropy of the materials are taken into account. The materials parameters of the piezoelectric layer are determined through fitting the measured and computed dispersion curves.

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KW - thin film devices

KW - thin-film bulk acoustic wave devices

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KW - BAW resonators

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DO - 10.1109/TUFFC.2004.1268466

M3 - Article

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JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

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SN - 0885-3010

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