(Et3Si)2Se as a precursor for atomic layer deposition: growth analysis of thermoelectric Bi2Se3

Tiina Sarnet (Corresponding Author), Timo Hatanpää, Marko Vehkamäki, Timo Flyktman, Jouni Ahopelto, Kenichiro Mizohata, Mikko Ritala, Markku Leskelä

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