Evaluation of LPCVD-grown PSG-layers for applications in integrated optics

Päivi Heimala, Jaakko Aarnio, Ulrika Gyllenberg, Hannu Ronkainen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	14th Nordic Semiconductor Meeting
Editors	Ole Hansen
Place of Publication	Lyngby
Publisher	Technical University of Denmark DTU
Pages	194-197
ISBN (Print)	978-87-8754-832-8, 978-87-9835-460-4
Publication status	Published - 1990
MoE publication type	A4 Article in a conference publication
Event	14th Nordic Semiconductor Meeting - Århus, Denmark Duration: 17 Jun 1990 → 20 Jun 1990

Seminar	14th Nordic Semiconductor Meeting
Country/Territory	Denmark
City	Århus
Period	17/06/90 → 20/06/90

Cite this

@inproceedings{d4334cac02c84ccaab2aa0354d8aa1fb,

title = "Evaluation of LPCVD-grown PSG-layers for applications in integrated optics",

author = "P{\"a}ivi Heimala and Jaakko Aarnio and Ulrika Gyllenberg and Hannu Ronkainen",

year = "1990",

language = "English",

isbn = "978-87-8754-832-8",

pages = "194--197",

editor = "Ole Hansen",

booktitle = "14th Nordic Semiconductor Meeting",

publisher = "Technical University of Denmark DTU",

address = "Denmark",

note = "14th Nordic Semiconductor Meeting ; Conference date: 17-06-1990 Through 20-06-1990",

}

Evaluation of LPCVD-grown PSG-layers for applications in integrated optics. / Heimala, Päivi; Aarnio, Jaakko; Gyllenberg, Ulrika et al.
14th Nordic Semiconductor Meeting. ed. / Ole Hansen. Lyngby: Technical University of Denmark DTU, 1990. p. 194-197.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Evaluation of LPCVD-grown PSG-layers for applications in integrated optics

AU - Heimala, Päivi

AU - Aarnio, Jaakko

AU - Gyllenberg, Ulrika

AU - Ronkainen, Hannu

PY - 1990

Y1 - 1990

M3 - Conference article in proceedings

SN - 978-87-8754-832-8

SN - 978-87-9835-460-4

SP - 194

EP - 197

BT - 14th Nordic Semiconductor Meeting

A2 - Hansen, Ole

PB - Technical University of Denmark DTU

CY - Lyngby

T2 - 14th Nordic Semiconductor Meeting

Y2 - 17 June 1990 through 20 June 1990

ER -