Evaluation of LPCVD-grown PSG-layers for applications in integrated optics

Päivi Heimala, Jaakko Aarnio, Ulrika Gyllenberg, Hannu Ronkainen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication14th Nordic Semiconductor Meeting
EditorsOle Hansen
Place of PublicationLyngby
PublisherDanmarks Tekniske Universitet
Pages194-197
ISBN (Print)978-87-8754-832-8, 978-87-9835-460-4
Publication statusPublished - 1990
MoE publication typeA4 Article in a conference publication
Event14th Nordic Semiconductor Meeting - Århus, Denmark
Duration: 17 Jun 199020 Jun 1990

Seminar

Seminar14th Nordic Semiconductor Meeting
CountryDenmark
CityÅrhus
Period17/06/9020/06/90

Cite this

Heimala, P., Aarnio, J., Gyllenberg, U., & Ronkainen, H. (1990). Evaluation of LPCVD-grown PSG-layers for applications in integrated optics. In O. Hansen (Ed.), 14th Nordic Semiconductor Meeting (pp. 194-197). Danmarks Tekniske Universitet.