@inproceedings{d4334cac02c84ccaab2aa0354d8aa1fb,
title = "Evaluation of LPCVD-grown PSG-layers for applications in integrated optics",
author = "P{\"a}ivi Heimala and Jaakko Aarnio and Ulrika Gyllenberg and Hannu Ronkainen",
year = "1990",
language = "English",
isbn = "978-87-8754-832-8",
pages = "194--197",
editor = "Ole Hansen",
booktitle = "14th Nordic Semiconductor Meeting",
publisher = "Technical University of Denmark DTU",
address = "Denmark",
note = "14th Nordic Semiconductor Meeting ; Conference date: 17-06-1990 Through 20-06-1990",
}