Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

M. Berdova, Kestutis Grigoras, T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila

Research output: Contribution to conferenceConference AbstractScientific

Original languageEnglish
Publication statusPublished - 2014
Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
Duration: 15 Jun 201418 Jun 2014
Conference number: 14

Conference

Conference14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated titleALD 2014
CountryJapan
CityKyoto
Period15/06/1418/06/14

Cite this

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., ... Franssila, S. (2014). Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
Berdova, M. ; Grigoras, Kestutis ; Ylitalo, T. ; Kassamakov, I. ; Heino, J. ; Törmä, P.T. ; Kilpi, Lauri ; Ronkainen, Helena ; Koskinen, J. ; Hæggström, E. ; Franssila, S. / Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
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title = "Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques",
author = "M. Berdova and Kestutis Grigoras and T. Ylitalo and I. Kassamakov and J. Heino and P.T. T{\"o}rm{\"a} and Lauri Kilpi and Helena Ronkainen and J. Koskinen and E. H{\ae}ggstr{\"o}m and S. Franssila",
note = "CA2: Ba1114 CA2: BA2164 Project code: 74717; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",
year = "2014",
language = "English",

}

Berdova, M, Grigoras, K, Ylitalo, T, Kassamakov, I, Heino, J, Törmä, PT, Kilpi, L, Ronkainen, H, Koskinen, J, Hæggström, E & Franssila, S 2014, 'Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques' 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 - 18/06/14, .

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. / Berdova, M.; Grigoras, Kestutis; Ylitalo, T.; Kassamakov, I.; Heino, J.; Törmä, P.T.; Kilpi, Lauri; Ronkainen, Helena; Koskinen, J.; Hæggström, E.; Franssila, S.

2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.

Research output: Contribution to conferenceConference AbstractScientific

TY - CONF

T1 - Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

AU - Berdova, M.

AU - Grigoras, Kestutis

AU - Ylitalo, T.

AU - Kassamakov, I.

AU - Heino, J.

AU - Törmä, P.T.

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Koskinen, J.

AU - Hæggström, E.

AU - Franssila, S.

N1 - CA2: Ba1114 CA2: BA2164 Project code: 74717

PY - 2014

Y1 - 2014

M3 - Conference Abstract

ER -

Berdova M, Grigoras K, Ylitalo T, Kassamakov I, Heino J, Törmä PT et al. Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. 2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.