Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

M. Berdova, Kestutis Grigoras, T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila

    Research output: Contribution to conferenceConference AbstractScientific

    Original languageEnglish
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E., & Franssila, S. (2014). Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.