Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

M. Berdova, Kestutis Grigoras, T. Ylitalo, I. Kassamakov, J. Heino, P.T. Törmä, Lauri Kilpi, Helena Ronkainen, J. Koskinen, E. Hæggström, S. Franssila

    Research output: Contribution to conferenceConference AbstractScientific

    Original languageEnglish
    Publication statusPublished - 2014
    Event14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan
    Duration: 15 Jun 201418 Jun 2014
    Conference number: 14

    Conference

    Conference14th International Conference on Atomic Layer Deposition, ALD 2014
    Abbreviated titleALD 2014
    CountryJapan
    CityKyoto
    Period15/06/1418/06/14

    Cite this

    Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., ... Franssila, S. (2014). Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
    Berdova, M. ; Grigoras, Kestutis ; Ylitalo, T. ; Kassamakov, I. ; Heino, J. ; Törmä, P.T. ; Kilpi, Lauri ; Ronkainen, Helena ; Koskinen, J. ; Hæggström, E. ; Franssila, S. / Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.
    @conference{0db02bdb4c1f4042841a43cad0797f39,
    title = "Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques",
    author = "M. Berdova and Kestutis Grigoras and T. Ylitalo and I. Kassamakov and J. Heino and P.T. T{\"o}rm{\"a} and Lauri Kilpi and Helena Ronkainen and J. Koskinen and E. H{\ae}ggstr{\"o}m and S. Franssila",
    note = "CA2: Ba1114 CA2: BA2164 Project code: 74717; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",
    year = "2014",
    language = "English",

    }

    Berdova, M, Grigoras, K, Ylitalo, T, Kassamakov, I, Heino, J, Törmä, PT, Kilpi, L, Ronkainen, H, Koskinen, J, Hæggström, E & Franssila, S 2014, 'Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques', 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 - 18/06/14.

    Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. / Berdova, M.; Grigoras, Kestutis; Ylitalo, T.; Kassamakov, I.; Heino, J.; Törmä, P.T.; Kilpi, Lauri; Ronkainen, Helena; Koskinen, J.; Hæggström, E.; Franssila, S.

    2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.

    Research output: Contribution to conferenceConference AbstractScientific

    TY - CONF

    T1 - Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

    AU - Berdova, M.

    AU - Grigoras, Kestutis

    AU - Ylitalo, T.

    AU - Kassamakov, I.

    AU - Heino, J.

    AU - Törmä, P.T.

    AU - Kilpi, Lauri

    AU - Ronkainen, Helena

    AU - Koskinen, J.

    AU - Hæggström, E.

    AU - Franssila, S.

    N1 - CA2: Ba1114 CA2: BA2164 Project code: 74717

    PY - 2014

    Y1 - 2014

    M3 - Conference Abstract

    ER -

    Berdova M, Grigoras K, Ylitalo T, Kassamakov I, Heino J, Törmä PT et al. Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. 2014. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.