Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

M. Berdova; Kestutis Grigoras; T. Ylitalo; I. Kassamakov; J. Heino; P.T. Törmä; Lauri Kilpi; Helena Ronkainen; J. Koskinen; E. Hæggström; S. Franssila

Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

M. Berdova
, Kestutis Grigoras
, T. Ylitalo
, I. Kassamakov
, J. Heino
, P.T. Törmä
, Lauri Kilpi
, Helena Ronkainen
, J. Koskinen
, E. Hæggström
, S. Franssila

Research output: Contribution to conference › Conference Abstract › Scientific

Original language	English
Publication status	Published - 2014
Event	14th International Conference on Atomic Layer Deposition, ALD 2014 - Kyoto, Japan Duration: 15 Jun 2014 → 18 Jun 2014 Conference number: 14

Conference

Conference	14th International Conference on Atomic Layer Deposition, ALD 2014
Abbreviated title	ALD 2014
Country/Territory	Japan
City	Kyoto
Period	15/06/14 → 18/06/14

Cite this

Berdova, M., Grigoras, K., Ylitalo, T., Kassamakov, I., Heino, J., Törmä, P. T., Kilpi, L., Ronkainen, H., Koskinen, J., Hæggström, E., & Franssila, S. (2014). Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques. Abstract from 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan.

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title = "Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques",

author = "M. Berdova and Kestutis Grigoras and T. Ylitalo and I. Kassamakov and J. Heino and P.T. T{\"o}rm{\"a} and Lauri Kilpi and Helena Ronkainen and J. Koskinen and E. H{\ae}ggstr{\"o}m and S. Franssila",

note = "CA2: Ba1114 CA2: BA2164 Project code: 74717; 14th International Conference on Atomic Layer Deposition, ALD 2014, ALD 2014 ; Conference date: 15-06-2014 Through 18-06-2014",

year = "2014",

language = "English",

}

Berdova, M, Grigoras, K, Ylitalo, T, Kassamakov, I, Heino, J, Törmä, PT, Kilpi, L, Ronkainen, H, Koskinen, J, Hæggström, E & Franssila, S 2014, 'Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques', 14th International Conference on Atomic Layer Deposition, ALD 2014, Kyoto, Japan, 15/06/14 - 18/06/14.

TY - CONF

T1 - Evaluation of Young's modulus and residual stress of suspended ALD thin films by bulge and MEMS shaft loading techniques

AU - Berdova, M.

AU - Grigoras, Kestutis

AU - Ylitalo, T.

AU - Kassamakov, I.

AU - Heino, J.

AU - Törmä, P.T.

AU - Kilpi, Lauri

AU - Ronkainen, Helena

AU - Koskinen, J.

AU - Hæggström, E.

AU - Franssila, S.

N1 - Conference code: 14

PY - 2014

Y1 - 2014

M3 - Conference Abstract

T2 - 14th International Conference on Atomic Layer Deposition, ALD 2014

Y2 - 15 June 2014 through 18 June 2014

ER -